Dual Push Between A Host Computer System And An RF Generator

ABSTRACT

A system and a method for increasing a rate of transfer of data between a radio frequency (RF) generator and a host computer system is described. The rate of transfer of data is increased by implementing dedicated physical layers associated with the RF generator and the host computer system and a dedicated physical communication medium between the RF generator and the host computer system. Moreover, a dual push operation is used between the RF generator and the host computer system. There is no request for data sent from the RF generator to the host computer system or from the host computer system to the RF generator.

CLAIM OF PRIORITY

The present patent application is a continuation of and claims thebenefit of and priority, under 35 U.S.C. §120, to U.S. patentapplication Ser. No. 14/974,915, filed on Dec. 18, 2015, and titled“Dual Push between a Host Computer System and an RF Generator”, whichclaims the benefit of and priority, under 35 U.S.C. §119(e), to U.S.Provisional Patent Application No. 62/109,010, filed on Jan. 28, 2015,and titled “Dual Push between a Host Computer System and an RFGenerator”, both of which are incorporated by reference herein in theirentirety for all purposes.

FIELD

The present embodiments relate to systems and methods for a dual pushbetween a host computer system and a radio frequency (RF) generator.

BACKGROUND

In a plasma system, multiple radio frequency (RF) generators areconnected to a plasma chamber. An RF generator is controlled by acomputer. For example, the computer provides values associated with anRF signal that is generated by the RF generator. The RF generator usesthe values to generate the RF signal, which is then sent to the plasmachamber. Plasma is generated in the plasma chamber upon reception of theRF signal.

Communication between the RF generator and the computer is slow. Thisslow communication hinders efficient control by the computer of the RFgenerator.

It is in this context that embodiments described in the presentdisclosure arise.

SUMMARY

Embodiments of the disclosure provide apparatus, methods and computerprograms for a dual push between a host computer system and a radiofrequency (RF) generator. It should be appreciated that the presentembodiments can be implemented in numerous ways, e.g., a process, anapparatus, a system, a device, or a method on a computer readablemedium. Several embodiments are described below.

In some embodiments, the dual push between the host system and the RFgenerator allows faster communication between the host system and the RFgenerator compared to another transfer protocol, e.g., Ethernet forcontrol automation technology (EtherCAT) protocol, Transmission ControlProtocol over Internet Protocol (TCP/IP), etc. The EtherCAT protocol islimited in response time and net load, e.g., number of slaves, etc.Moreover, the TCP/IP protocol has overhead associated with packet retryand timeout. The other transfer protocol involves error-checking forerrors in packets, communication of indication of the error, andre-transmission of a packet. The error-checking, communication of theindication of the error, and the re-transmission consumes time. The dualpush applies a communication protocol, e.g., a universal datagramprotocol (UDP), a customized protocol etc., that continuously pushestransfer units, e.g., packets, etc., between the host system and the RFgenerator. For example, no error-checking for each packet is performedby a receiver of the packet, no communication of an indication of theerror is performed by the receiver, and no re-transmission is performedby a transmitter of the packet. As another example, none of the packetsare sent again and no confirmation is received from a receiver that apacket is received. As yet another example, there is no request by thehost system for information associated with one or more parameters fromthe RFG and there is no request by the RFG for one or more set points ofone or more parameters from the host system. Once, the RFG is configuredto send the information associated with one or more parameters by thehost computer, the RFG sends one or more packets to the host computerand the host computer analyzes the information associated with one ormore parameters stored in the one or more packets to determine whetherto send modified set points or to send the same set points as that sentpreviously to the RFG.

In some embodiments, a dual push utilizes an Ethernet stack for pushinga first fixed UDP datagram for monitoring an output of an RF generatorand utilizes an Ethernet stack for pushing a second fixed UDP datagramfor controlling the RF generator.

In various embodiments, in a dual push apparatus, the host system andthe RF generator are connected to each other via dedicated communicationlinks of a physical communication medium and dedicated transmitters anddedicated receivers. For example, a dedicated transmitter of the hostsystem is connected via a dedicated communication link of the physicalcommunication medium to a dedicated receiver of the RF generator and adedicated transmitter of the RF generator is connected via a dedicatedcommunication link of the physical communication medium to a dedicatedreceiver of the host system. The dedicated receiver of the host systemapplies the communication protocol to a packet received from thededicated transmitter of the RF generator to extract the informationassociated with one or more parameters within the packet. Theinformation associated with one or more parameters is provided to aprocessor of the host system. The processor generates a value of aparameter from the information associated with one or more parametersand determines whether the value is within a pre-determined range of avalue of the parameter sent previously to the dedicated receiver of theRF generator. Upon determining that the value is not within thepre-determined range, the processor modifies a value of the parameter tobe within the pre-determined range and provides the value to thededicated transmitter of the host system for communicating to thededicated receiver of the RF generator via the dedicated communicationlink of the physical communication medium. As another example, a1-gigabit physical layer pushes a 512 byte frame to a dedicated clientthat also has a 1-gigabit physical layer for reception of the frame. Thepushing is done to achieve a speed of 100 kilohertz.

In some embodiments, the non-performance by the dual push apparatus oferror-checking, of communication of the indication of the error, and ofre-transmission of a packet that has the error saves time and cost.

Moreover, in various embodiments, the dedicated communication linksreduce chances of packets from different source ports colliding anddropping. The dedicated communication links are not shared betweendifferent RF generators or different controllers reduce the chances ofpackets colliding and dropping. For example, if packets are sent to twodifferent RF generators via a shared communication link, there may becollision between the packets, resulting in loss or error in data thatis sent to the RF generators. By using a dedicated communication linkthat is connected to one RF generator, the host system cannot sendpackets to a different RF generator via the dedicated communication linkto prevent the collision.

Additional advantages of the dual push apparatus include an increase bymultiple times, e.g., 100 times, 1000 times, 100 thru 1000 times, etc.,in response time of a response by an RF generator to a controller of thehost system or by the controller to the RF generator compared to anotherprotocol, e.g., the EtherCAT protocol, TCP/IP, etc.

Other aspects will become apparent from the following detaileddescription, taken in conjunction with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

The embodiments may best be understood by reference to the followingdescription taken in conjunction with the accompanying drawings.

FIG. 1A is a diagram of a plasma system for using a dual push between acontroller and a radio frequency generator (RFG), in accordance with anembodiment described in the present disclosure.

FIG. 1B is a diagram of an embodiment of the controller and the RFG ofthe plasma system of FIG. 1A to illustrate a communication between thecontroller and the RFG, in accordance with an embodiment described inthe present disclosure.

FIG. 2A is a diagram of a system to illustrate use of a communicationprotocol between a number of local controllers, a number of RFgenerators, and a master system controller, in accordance with anembodiment described in the present disclosure.

FIG. 2B is a diagram of a system to illustrate a number of localcontrollers that are placed on one board, in accordance with anembodiment described in the present disclosure.

FIG. 2C is a diagram of a system to illustrate communication between thelocal controllers and the master system controllers without use of aswitch between the local controllers and the master system controllers,in accordance with an embodiment described in the present disclosure.

FIG. 3 is a diagram to illustrate a universal datagram protocol (UDP)transfer unit or a customized transfer unit, in accordance with anembodiment described in the present disclosure.

FIG. 4 is a diagram of multiple graphs to illustrate multiple states ofan RF signal, in accordance with an embodiment described in the presentdisclosure.

FIG. 5 is a diagram of a system to illustrate a communication of databetween a local processor board system and an RFG and between the localprocessor board system and another processor board system, in accordancewith an embodiment described in the present disclosure.

FIG. 6 is a diagram to illustrate a payload of a transfer unit that isgenerated and sent by a dedicated transmitter of a controller of a hostcomputer system to an RF generator, in accordance with an embodimentdescribed in the present disclosure.

FIG. 7 is a diagram to illustrate a payload of a transfer unit that isgenerated and sent by a dedicated transmitter of an RFG to a controllerof the host computer system, in accordance with an embodiment describedin the present disclosure.

FIG. 8 is a graph to illustrate sampling of set points of one or moreparameters to be used in generating an RF signal, in accordance with anembodiment described in the present disclosure.

FIG. 9 is a flowchart of a method to illustrate push of transfer unitsby using a communication protocol between a dedicated transmitter of anRFG and a dedicated receiver of a controller and between a dedicatedtransmitter of the controller and a dedicated receiver of the RFG, inaccordance with an embodiment described in the present disclosure.

FIG. 10A is a diagram to illustrate a method for changing a value of aparameter for a state by analyzing a value of the parameter for thestate while a transfer unit is being received by a receiver, inaccordance with an embodiment described in the present disclosure.

FIG. 10B is a diagram to illustrate a method for changing a value of aparameter for a state by analyzing a value of the parameter for thestate before a transfer unit is being received by a receiver, inaccordance with an embodiment described in the present disclosure

DETAILED DESCRIPTION

The following embodiments describe systems and methods for a dual pushbetween a host computer system and a radio frequency (RF) generator. Itwill be apparent that the present embodiments may be practiced withoutsome or all of these specific details. In other instances, well knownprocess operations have not been described in detail in order not tounnecessarily obscure the present embodiments.

In some embodiments, the dual push is performed when there is no requestsent from the host computer system to the RF generator for informationassociated with one or more parameters and no request sent from the RFgenerator to the host computer system for one or more set points, e.g.,one or more values, etc., of the one or more parameters. The RFgenerator is configured by the host computer system to send one or morepackets having the information associated with one or more parametersand once the RF generator is configured, the RF generator initiates andcontinues to send the one or more packets. Once the host computerreceives the one or more packets, the host computer determines whetherto modify the one or more set points, and based on the determination,sends one or more packets that include either the one or more set pointsthat are not modified or one or more modified set points to the RFG. Inseveral embodiments, a push is a transmission of data by a senderwithout a receiver of the data requesting the data.

In various embodiments, the RFG and a co-controller of the host computersystem are connected with each other via a dedicated physical layerconnected to the co-controller, via a dedicated physical communicationmedium connecting the RFG to the host computer system, and via adedicated physical layer connected to a dedicated processor of the RFG.The dedicated physical layers of the RFG and the host computer systemand the dedicated physical communication medium facilitates a fasttransfer of data between the RFG and the host computer system. There isno need for error-checking, or re-sending of packets that have errors,etc., between the RFG and the host computer system.

FIG. 1A is a diagram of an embodiment of a plasma system 10 for usingthe dual push between a controller 20, e.g., a local controller, etc.,and an RF generator (RFG) 22. The plasma system 10 includes the RFG 22,an impedance matching circuit (IMC) 14, the controller 20, and a plasmachamber 24. The plasma chamber 24 is connected to the IMC 14 via an RFtransmission line 12. The RFG 22 is connected to the IMC 14 via an RFcable 16. In some embodiments, examples of a controller include a CPU, acomputer, a processor, a microprocessor, an application specificintegrated circuit (ASIC), and a programmable logic device (PLD). Invarious embodiments, a controller includes a combination of a processorand a memory device. Examples of a memory device include a read-onlymemory (ROM), a random access memory (RAM), a hard disk, a volatilememory, a non-volatile memory, a redundant array of storage disks, aFlash memory, etc.

The controller 20 generates a control signal to the RFG 22 and thecontrol signal includes one or more set points, e.g., values, etc., ofone or more parameters, e.g., frequency, power, etc., for one or morestates, e.g., a state S0, a state S1, a state S2, a state S3, a stateS4, etc., to the RFG 22. A dedicated transmitter (Tx) of a dedicatedphysical layer 23 of the controller 20 applies a communication protocol,e.g., a universal datagram protocol (UDP), a UDP over Internet Protocol(UDP over IP), UDP over IP over Ethernet, a customized protocol, etc.,to the control signal to generate one or more transfer units, e.g.,datagrams, UDP datagrams, packets, etc., and sends the one or moretransfer units via a dedicated communication link 30 to the RFG 22during a clock cycle CA. The dedicated communication link 30 is a partof a physical communication medium 31. In various embodiments, examplesof a physical communication medium include a coaxial cable, a conductorcable, a wired medium, a twisted pair, a fiber optic link, a cable, anEthernet cable, a wireless medium, etc.

In some embodiments, a dedicated communication link is used to performpoint-to-point communication between two devices, e.g., a dedicatedphysical layer 23 of the controller 20 and a dedicated physical layer 21of the RFG 22, etc. For example, the dedicated communication link 30 isa channel of one or more transfer units for sending one or more setpoints of one or more parameters from the physical layer 23 of thecontroller 20 to the dedicated physical layer 21 of the RFG 22 and adedicated communication link 32 is a channel of one or more transferunits for sending from the physical layer 21 of the RFG 22 to thephysical layer 23 of the controller 20. In various embodiments, achannel is a logical connection used to convey data over a cable and hasa capacity that is measured in bits per second.

In some embodiments, a physical layer is a port, e.g., an Ethernet port,a UDP port, a communication port, etc. In various embodiments, adedicated physical layer transfers, e.g., sends, receives, etc., at arate in an order of gigabits per second (Gbps). In various embodiments,a dedicated physical layer is a communication device, e.g., atransceiver, etc., that transfers, e.g., sends, receives, etc., one ormore transfer units at a rate of gigabits per second or a rate higherthan gigabits per second, e.g., at a rate of terabits per second (Tbps),etc.

A clock cycle is of a clock signal that is generated by a clock sourcethat is located within the controller 20 or outside the controller 20.Examples of a clock source include an oscillator, an oscillator with aphase-locked loop, etc. In some embodiments, the clock source thatgenerates the clock signal is located in an RFG or a controller. Forexample, the clock source is located within the controller 20 andprovides the clock signal to the RFG 22 or other RFGs connected to andcontrolled by the controller 20.

In some embodiments, a state, referred to herein, is of an RF signalthat is generated by an RF generator. A state is distinguished fromanother state by a controller. For example, a state of an RF signal hasmultiple power values that are exclusive from multiple power values ofanother state of the RF signal. The multiple power values of a statehave a different level than multiple power values of another state sothat during a pre-defined period of time during a clock cycle, there isa difference between the two levels.

In several embodiments, a state of an RF signal is synchronized with astate of a clock signal. For example, a clock signal has a high level,e.g., a bit 1, etc., and a low level, e.g., a bit 0, etc. The RF signal,which is sinusoidal, transitions between the two states when the clocksignal transitions between the two states. To illustrate, when the clocksignal is at the high level, the RF signal is at a high level. When theclock signal transitions from the high level of the clock signal to thelow level of the clock signal, the RF signal transitions from the highlevel of the RF signal to a low level of the RF signal. When the clocksignal is at the low level of the clock signal, the RF signal is at thelow level of the RF signal. When the clock signal transitions from thelow level of the clock signal to the high level of the clock signal, theRF signal transitions from the low level of the RF signal to the highlevel of the RF signal.

In various embodiments, an RF signal has any number of states. Forexample, when the clock signal is at the high level, the RF signaltransitions between different levels and when the clock signal is at thelow level, the RF signal has one state. As another example, when theclock signal is at the low level, the RF signal transitions betweendifferent levels and when the clock signal is at the high level, the RFsignal has one state. As yet another example, when the clock signal isat the high level, the RF signal transitions between different levelsand when the clock signal is at the low level, the RF signal transitionsbetween different levels.

The physical layer 21 of the RFG 22 includes a dedicated receiver (Rx)that receives one or more transfer units via the dedicated communicationlink 30 and applies the communication protocol to extract the controlsignal from the transfer units. The dedicated receiver of the RFG 22 isa part of the dedicated physical layer 21 of the RFG 22. A dedicatedprocessor, e.g., a digital signal processor (DSP), a field programmablegate array, an application specific integrated circuit, etc., of the RFG22 parses the control signal to distinguish one or more set points ofone or more parameters for a state from one or more set points of one ormore parameters for another state. The dedicated processor of the RFG 22provides one or more set points of one or more parameters for one stateto a parameter controller, e.g., an auto-frequency tuner (AFT), a powercontroller, etc., and one or more set points of the parameter foranother state to another parameter controller, e.g., an AFT, a powercontroller, etc. Each parameter controller associated with a statedrives, via a driver, e.g., a transistor, a group of transistors, etc.,an RF power supply, e.g., an RF power source, etc., of the RFG 22 togenerate an RF signal having the states.

The RF signal having multiple states is sent from the RFG 22 via the RFcable 16 to the IMC 14. The IMC 14 matches an impedance of a loadconnected to an output of the IMC 14 with that of a source connected toan input of the IMC 14 to generate a modified RF signal. Examples of thesource include one or more RF generators that are coupled to the IMC 14via corresponding RF cables and that are operational, and furtherinclude the RF cables that couple the RF generators to the IMC 14.Examples of the load include the RF transmission line 12 and the plasmachamber 24.

The IMC 14 provides the modified RF signal via the RF transmission line12 to a chuck 18 of the plasma chamber 24. At a time the modified RFsignal is supplied from the IMC 14 to the chuck 18, a process gas, e.g.,an oxygen-containing gas, a fluorine-containing gas, a gas containingcarbon and fluorine, etc. is supplied between an upper electrode 26 ofthe plasma chamber 24 and the chuck 18 via gas inlets in the upperelectrode 26. An example of the oxygen-containing gas includes oxygenand examples of the fluorine-containing gas include tetrafluoromethane(CF₄), sulfur hexafluoride (SF₆), hexafluoroethane (C₂F₆), C₄F₆ gas,C₄F₃ gas, C₃F₈ gas, etc. When both the process gas and the modified RFsignal are supplied to the plasma chamber 24, plasma is generated or ismaintained within the plasma chamber 24.

The plasma is used to perform one or more operations, e.g., etching,doping, ion implantation, cleaning, deposition, photolithographicpatterning, etc., on a substrate, e.g., a wafer, etc., to formintegrated circuits on the substrate. The integrated circuits are thendiced and packaged, and used in a variety of electronic devices, e.g.,cell phones, computers, tablets, cameras, exercise equipment, watches,etc.

In some embodiments, the RFG 22 includes one or more sensors, e.g.,voltage sensors, current sensors, complex impedance sensors, powersensors, etc., that sense, e.g., detect, measure, etc., acharacteristic, e.g., power, voltage, current, impedance, etc., of theRF signal that is sent from an output node of the RFG 22. The one ormore sensors are connected to the output node of the RFG 22 and the RFsignal is provided by the RF generator 22 at the output.

In some embodiments, the one or more sensors are connected to any otherportion of the plasma system 10 to measure a characteristic of an RFsignal at that portion.

The dedicated processor of the RFG 22 determines, e.g., identifies,calculates, etc., the information associated with one or more parametersfrom the characteristic of the RF signal generated by the RFG 22 or froma value of a parameter received from the controller 20. Examples ofinformation associated with one or more parameters include a value ofsupplied power, a value of delivered power, a value of reflected power,a value of a real part of gamma, a value of an imaginary part of gamma,a value of a voltage standing wave ratio (VSWR), an amount of timeelapsed from a clock edge of a clock signal, a set point within acontroller of the RFG 22, a status vector, e.g., an alarm vector, etc.,used to determine whether the information is outside a pre-determinedrange, a measured value of the parameter, a value of the parameter thatis received from the controller 20, a combination thereof, etc. Toillustrate, delivered power is calculated as a difference betweensupplied power and reflected power. The set point within the controllerof the RFG 22 is received from the controller 20 via the dedicatedcommunication link 30. The supplied power is power supplied from theoutput of the RFG 22 to the IMC 14 via the RF cable 16. The reflectedpower is power reflected from the plasma chamber 24 via the RFtransmission line 12 and the IMC 14 to the output of the RFG 22. Asanother illustration, a relationship between a reflected power signaland a supplied power signal is determined to generate values of gamma.

A dedicated transmitter (Tx) of the physical layer 21 of the RFG 22applies the communication protocol to the information associated withone or more parameters to generate one or more transfer units, and sendsduring a clock cycle CB or during the clock cycle CA the one or moretransfer units via the dedicated communication link 32 to a dedicatedreceiver Rx of the physical layer 23 of the controller 20. The dedicatedcommunication link 32 is a part of the physical communication medium 31.In various embodiments, having the dedicated communication links 30 and32 of the physical layer 31 reduces chances of collision of packets. Forexample, when packets are sent along a shared communication link betweenthe controller 20 and multiple RFGs, including the RFG 22, there iscollision between the packets and some of the packets are lost as aresult of the collision. The dedicated communication links 30 and 32between the RFG 22 and the controller 20 reduce chances of suchcollision. For example, packets cannot be sent between another RFG,other than the RFG 22, and the controller 20, and so, chances of thecollision are reduced.

A dedicated receiver Rx of the physical layer 23 of the controller 20applies the communication protocol to one or more transfer unitsincluding the information associated with one or more parameters toextract the information, and sends the information to a processor of thecontroller 20. The processor of the controller 20 processes theinformation associated with one or more parameters. For example, theprocessor of the controller 20 calculates or identifies a value of aparameter for a state of an RF signal from the information, e.g.,calculates supplied power from delivered power and reflected power,calculates supplied power from gamma and reflected power, identifiesmeasured power, identifies the set point within the controller of theRFG 22, identifies that the status vector indicates a fault, etc., andcompares the value of the parameter with a value of the parameter sentduring the clock cycle CA to the RFG 22 via the dedicated communicationlink 30. The processor of the controller 20 determines whether thecalculated value of a parameter for a state of an RF signal is withinthe pre-determined range of the value of the parameter for the statepreviously sent during the clock cycle CA to the RFG 22 via thededicated communication link 30. Upon determining that the calculatedvalue of a parameter is within the pre-determined range of the value ofthe parameter previously sent during the clock cycle CA to the RFG 22,the processor of the controller 20 determines not to change the value ofthe parameter previously sent to the RFG 22. On the other hand, upondetermining that the calculated value of a parameter is outside thepre-determined range of the value of the parameter previously sentduring the clock cycle CA to the RFG 22, the processor of the controller20 determines to change a value of the parameter for the same state ofthe RF signal as that for which the value of the parameter is previouslysent to the RFG 22.

Such comparison of parameter values allows the controller 20 and the RFG22 to push data at a high rate without waiting to check accuracy of thedata, without waiting for re-transmission of the same packet, andwithout an indication of a timeout. For example, an acknowledgement ofwhether a packet is received by the RFG 22 from the controller 20 is notgenerated by the dedicated receiver of the physical layer 21 of the RFG22 and an acknowledgement whether a packet is received by the controller20 from the RFG 22 is not generated by the dedicated receiver of thephysical layer 23 of the controller 20. As another example, there is noindication of a timeout by the controller 20 to itself when anacknowledgment of a packet sent from the controller 20 to the RFG 22 isnot received by the controller 20 from the RFG 22 within apre-determined time period. As another example, there is no indicationof a timeout by the RFG 22 to itself when an acknowledgment of a packetsent from the RFG 22 to the controller 20 is not received by the RFG 22from the controller 20 within a pre-determined time period. In someembodiments, a timeout initiates a re-transmission of a packet by asender of the packet.

In various embodiments, the dedicated transmitter Tx of the physicallayer 21 of the RFG 22 sends the information regarding one or moreparameters during the same clock cycle CA in which one or more transferunits used to generate the information are received by the dedicatedreceiver Rx of the RFG 22.

In some embodiments, a pre-determined number of clock cycles existbetween the clock cycles CA and CB. For example, a number of one or moreclock cycles occur during which an RF signal is generated by the RFG 22from a parameter received during the clock cycle CA, during which theone or more sensors sense the characteristic of the RF signal, andduring which the dedicated processor of the RFG 22 determines theinformation associated with the parameter from the characteristic. Theclock cycles are located between the clock cycle CB and the clock cycleCA. In some embodiments, during the pre-determined number of clockcycles between CA and CB, the dedicated transmitter Tx of the physicallayer 23 of the controller 20 continues to send one or more transferunits to the RFG 22 via the dedicated communication link 30.

In several embodiments, the information associated with one or moreparameters includes one or more bits indicating whether a value of aparameter that is sent previously during the clock cycle CA by thededicated transmitter of the physical layer 23 of the controller 20 isreceived by the dedicated receiver of the physical layer 21 of the RFG22. The processor of the controller 20 determines from the one or morebits whether or not the dedicated receiver of the RFG 22 received thevalue of the parameter. For example, the processor of the controller 20compares the bits to value of the parameter sent to the RFG 22 duringthe clock cycle CA previously and upon determining that there is a matchbetween the bits and the value, the processor determines that the RFG 22received the value of the parameter sent during the clock cycle CA. Onthe other hand, upon determining that there is no a match between thebits and the value, the processor determines that the RFG 22 did notreceive the value of the parameter sent during the clock cycle CA.

In various embodiments, the information associated with one or moreparameters includes a measured value of the parameter. For example, theRFG 22 includes one or more sensors that measure a value of a parameterand the measured value is sent from the RFG 22 to the controller 20 byapplying the communication protocol. The measured value is compared bythe controller 20 to a value of the parameter that is previously sentduring the clock cycle CA to the RFG 22 to determine whether the valueof the parameter is received previously by the RFG 22. For example, theprocessor of the controller 20 processes the information regarding theparameter to determine whether the calculated value of a parameter iswithin a pre-determined range of the value of the parameter previouslysent to the RFG 22 during the clock cycle CA via the dedicatedcommunication link 30. Upon determining that the measured value for astate is within the pre-determined range of the value of the parameterfor the state that is previously sent during the clock cycle CA to theRFG 22, the processor of the controller 20 does not change the value ofthe parameter for the state for sending to the RFG 22 during a clockcycle, e.g., the clock cycle CA, the clock cycle CB, or a next clockcycle CC. The next clock cycle CC occurs after the clock cycle CB. Onthe other hand, upon determining that the measured value for the stateis not within the pre-determined range of the value of the parameter forthe state that is previously sent during the clock cycle CA to the RFG22, the processor of the controller 20 changes the value of theparameter for the state to be within the pre-determined range forsending to the RFG 22 via the dedicated communication link 30 during thenext clock cycle.

In some embodiments, the information associated with one or moreparameters includes a set point of a parameter that is sent previouslyduring the clock cycle CA by the dedicated transmitter of the physicallayer 23 of the controller 20 to the dedicated receiver of the physicallayer 21 of the RFG 22. The processor of the controller 20 determinesfrom the set point whether or not the dedicated receiver of the physicallayer 21 of the RFG 22 previously received during the clock cycle CA theset point of the parameter. For example, upon determining that s setpoint of a parameter for a state received by the controller 20 from theRFG 22 is within s pre-determined range of a value of a parameter thatis previously sent during the clock cycle CA by the controller 20 to theRFG 22, the processor of the controller 20 determines not to change theset point of the parameter for the state for sending to the RFG 22during the next clock cycle. On the other hand, upon determining thatthe set point of the parameter for the state received by the controller20 from the RFG 22 is outside the pre-determined range of the value ofthe parameter that is previously sent by the controller 20 to the RFG22, the processor of the controller 20 determines to change the setpoint of the parameter for the state to be within the pre-determinedrange for sending to the RFG 22 during the next clock cycle.

In several embodiments, upon determining that the information associatedwith one or more parameters is outside a pre-determined range of a valueof a set point previously sent during the clock cycle CA from thecontroller 20 to the RFG 22, the processor of the controller 20generates alarm data. The alarm data is rendered by the processor of thecontroller 20 on a display device to display to a user or is displayedin a form of a blinking light emitter or is provided in a form of anaudio output to inform a user that a portion of the plasma system 10,e.g., one or more components within the RFG 22, or one or morecomponents within the plasma chamber 24, or one or more componentswithin the IMC 14, or a combination thereof, etc., is malfunctioning oris not operating.

In some embodiments, the dedicated processor of the RFG 22 determineswhether the information associated with one or more parameters isoutside a pre-determined range of a value of a set point previously sentduring the clock cycle CA to the RFG 22. Upon determining that theinformation associated with one or more parameters is outside thepre-determined range of a value of a set point previously sent duringthe clock cycle CA to the RFG 22, the dedicated processor of the RFG 22generates alarm data. The alarm data is sent to the dedicatedtransmitter of the physical layer 21 of the RFG 22 by the dedicatedprocessor of the RFG 22. The dedicated transmitter Tx of the physicallayer 21 of the RFG 22 generates one or more transfer units that includethe alarm data as payload and sends the one or more transfer units tothe dedicated receiver of the physical layer 23 of the controller 20.The dedicated receiver of the physical layer 23 of the controller 20receives the one or more transfer units and parses the one or moretransfer units to extract the alarm data. The alarm data is providedfrom the dedicated receiver of the controller 20 to the processor of thecontroller 20, and the processor of the controller 20 renders the alarmdata on a display device to display to a user or displays the alarm datain a form of a blinking light emitter or provides the audio data in theform of an audio output to inform the user that a portion of the plasmasystem 10 is malfunctioning or is not operating

In several embodiments, the controller 20 provides chamber facilities,e.g., type of gas to be provided to the plasma chamber 24, flow rates offlow of a process gas into the plasma chamber 24, pressure within theplasma chamber 24, separation between the chuck 18 and the upperelectrode 26, etc. to control a variety of mechanisms, e.g., drivers fordriving motors that controls movement of the upper electrode 26 and ofthe chuck 18 to control separation between the upper electrode 26 andthe chuck 18, a power source for providing power to a heater to controltemperature within the plasma chamber 24, a driver for driving a valvethat controls a flow rate of a process gas into the plasma chamber 24, adriver for driving a motor that controls movement of confinement ringsfor controlling pressure within the plasma chamber 24, etc.

In various embodiments, a dedicated receiver, e.g., the receiver of thephysical layer 21, the receiver of the physical layer 23, etc., thatapplies the communication protocol does not apply error checking to atransfer unit and does not indicate the error to a dedicatedtransmitter, e.g., the transmitter of the physical layer 21, thetransmitter of the physical layer 23, etc., that sent the transfer unit.For example, a dedicated receiver does not apply a checksum to atransfer unit. As another example, a dedicated receiver does not send atransfer unit including a message that another transfer unit is notreceived from a dedicated transmitter. Such exclusion of error checkingand correction saves time in the real-time dynamic plasma system 10 andincreases data rate associated with the plasma system 10.

In some embodiments, a dedicated receiver, as used herein, is acomponent of a transceiver circuit that applies the communicationprotocol to one or more transfer units to extract one or more set pointsof one or more parameters or to extract the information associated withone or more parameters. In these embodiments, the dedicated receiverincludes a memory device, e.g., a buffer, a queue, etc., to store theextracted one or more set points or the extracted information associatedwith one or more parameters to be read by a processor of a controller ora dedicated processor connected to the dedicated receiver.

In various embodiments, a dedicated transmitter, as used herein, is acomponent of a transceiver circuit that applies the communicationprotocol to one or more set points of one or more parameters or to theinformation associated with one or more parameters to generate one ormore transfer units. In these embodiments, the dedicated transmitterincludes a memory device, e.g., a buffer, a queue, etc., to receive theone or more set points or the information associated with one or moreparameters from a processor of a controller or a dedicated processorconnected to the dedicated transmitter for generating the one or moretransfer units.

In several embodiments, a physical layer, as used herein, is atransceiver or a device that includes both a transmitter circuit and areceiver circuit or a communication device that applies thecommunication protocol.

FIG. 1B is a diagram of an embodiment of a system 35 to illustratecommunication between the controller 20 and the RFG 22. A processor ofthe controller 20 generates one or more set points of one or moreparameters and provides the one or more set points to the dedicatedtransmitter Tx of the physical layer 23 of the controller 20. Thededicated transmitter of the physical layer 23 of the controller 20applies the communication protocol to the one or more set points togenerate one or more transfer units and sends the one or more transferunits during the clock cycle CA via the dedicated communication link 30to the receiver port Rx of the physical layer 21 of the RFG 22. Thereceiver port Rx of the physical layer 21 of the RFG 22 applies thecommunication protocol to the one or more transfer units to extract theone or more set points and provides the one or more set points to thededicated processor of the RFG 22.

The dedicated processor determines from the one or more set pointswhether a set point corresponds to a state S0 or S1 of an RF signal andwhether the set point is a frequency value or a power value. Moreover,the dedicated processor determines whether a clock signal that isreceived from the clock source has the state S1 or the state S0. Upondetermining that the set point is for the state S1 of an RF signal andhas a power value and upon determining that the clock signal indicatesthe state S1, the dedicated processor sends the set point to a powercontroller PWR S1. On the other hand, upon determining that the setpoint is for the state S0 of an RF signal and has a power value and upondetermining that the clock signal indicates the state S0, the dedicatedprocessor sends the set point to a power controller PWR S0. Moreover,upon determining that the set point is for the state S1 of an RF signaland has a frequency value and upon determining that the clock signalindicates the state S1, the dedicated processor sends the set point toan auto frequency tuner (AFT) AFT S1. Upon determining that the setpoint is for the state S0 of an RF signal and has a frequency value andupon determining that the clock signal indicated the state S0, thededicated processor sends the set point to an AFT S0. In someembodiments, an AFT is a controller.

During the state S1 of the clock signal, the power controller PWR S1generates a drive power value, which is identified from or the same asthe power set point for the state S1 of an RF signal, and provides thedrive power value to an RF power supply of the RFG 22 such that the RFG22 generates the RF signal having the drive power value. Similarly,during the state S0 of the clock signal, the power controller PWR S0generates a drive power value, which is identified from or the same asthe power set point for the state S0 of an RF signal, and provides thedrive power value to the RF power supply of the RFG 22 such that the RFG22 generates the RF signal having the drive power value.

Moreover, during the state S1 of the clock signal, the AFT S1 generatesa drive frequency value, which is identified from or the same as thefrequency set point for the state S1 of an RF signal, and provides thedrive frequency value to the RF power supply of the RFG 22 such that theRFG 22 generates the RF signal having the drive frequency value.Similarly, during the state S0 of the clock signal, the AFT S0 generatesa drive frequency value, which is identified from or the same as thefrequency set point for the state S0 of an RF signal, and provides thedrive frequency value to the RF power supply of the RFG 22 such that theRFG 22 generates the RF signal having the drive frequency value.

In some embodiments, a set point includes a value of power or frequencyand a state of an RF signal during which the value is to be achieved.

A sensor, e.g., a complex voltage and current sensor, a power sensor, animpedance sensor, etc., measures one or more parameters at an output ofthe RFG 22. The RF signal generated by the RFG 22 is sent via the outputto the IMC 14. The measured one or more parameters are provided to thededicated processor and the dedicated processor generates theinformation associated with one or more parameters from the one or moremeasured parameters. In some embodiments, the information associatedwith one or more parameters is the measured one or more parameters. Thededicated processor sends the information associated with one or moreparameters to the dedicated transmitter Tx of the physical layer 21 ofthe RFG 22.

The dedicated transmitter Tx of the physical layer 21 of the RFG 22applies the communication protocol to the information associated withone or more parameters to generate one or more transfer units and sends,during the clock cycle CB or the clock CA or another clock cycle, theone or more transfer units via the dedicated communication link 32 tothe dedicated receiver Rx of the physical layer 23 of the controller 20.The dedicated receiver of the physical layer 23 of the controller 20applies the communication protocol to extract the information associatedwith one or more parameters and provides the information associated withone or more parameters to the processor of the controller 20.

The processor of the controller 20 determines from the informationassociated with one or more parameters whether one or more set points ofone or more parameters are to be changed and if so, generates thechanged set points. The changed set points are provided by the processorto the dedicated transmitter of the physical layer 23 of the controller20. The dedicated transmitter of the physical layer 23 of the controller20 applies the communication protocol to the one or more set points togenerate one or more transfer units and sends, during the clock cycleCC, the clock cycle CB, the clock cycle CA, or another clock cycle, theone or more transfer units via the dedicated communication link 30 tothe dedicated receiver of the RFG 22 for changing one or more parametersof an RF signal generated by the RFG 22.

FIG. 2A is a diagram of an embodiment of a system 202 to illustrate useof the communication protocol between a number of local controllers, anumber of RF generators, and a master system controller 204. The system202 includes a host computer system 200, which further includes thelocal controllers, e.g., co-controller 1, co-controller 2, co-controller3, primitive control function co-controller, and a non-critical datacontroller, etc. The host computer system 200 is an example of thecontroller 20 (FIG. 1A). It should be noted that the co-controller 1 isshown as “CoreBd-coprocess #1” in FIG. 2A. Moreover, the co-controller 2is shown as “CoreBd-coprocess #2” in FIG. 2A and the co-controller 3 isshown as “CoreBd-coprocess #3” in FIG. 2A. Also, the primitive controlfunction co-controller is shown as “CoreBd-Primitive Control Functions”in FIG. 2A and the non-critical data controller is shown as“CoreBd-Local Master (Non-Critical Data Processor)”. The host computersystem 200 further includes the master system controller 204 and aswitch 212.

A processor of the master system controller 204 generates a command tosend to one of the local controllers. For example, the processor of themaster system controller 204 generates the command that includes one ormore set points, e.g., values, etc., of one or more parameters for theRFG 1. A transmitter of a physical layer connected to the master systemcontroller 204 generates one or more transfer units from the commandgenerated by the processor of the master system controller 204 byapplying the communication protocol and sends the one or more transferunits to the switch 212 via a communication link of a physicalcommunication medium 207 a that connects the physical layer associatedwith the master system controller 204 to the switch 212. The physicallayer associated with the master system controller 204 is one connectedto the master system controller 204.

The switch 212 transfers the one or more transfer units to a dedicatedreceiver of a dedicated physical layer 202 d of the primitive controlfunction co-controller via a dedicated communication link of a physicalcommunication medium 207 b that connects the switch 212 to the dedicatedreceiver. For example, the switch 212 recognizes an identity of adestination port of the primitive control function co-controllerincluded within a transfer unit and transfers the transfer unit to thedestination port.

The dedicated receiver of the dedicated physical layer 202 d connectedto the primitive control function co-controller receives the one or moretransfer units from the master system controller 204 and applies thecommunication protocol to the one or more transfer units to extract thecommand from the one or more transfer units. The dedicated receiver ofthe dedicated physical layer 202 d of the primitive control functionco-controller also determines that the command is designated to be sentto the RFG 1. The command and the determination that the command isdesignated to be sent to the RFG 1 are provided to a processor of theprimitive control function co-controller from the dedicated receiver ofthe dedicated physical layer 202 d. The processor of the primitivecontrol function co-controller provides the command and thedetermination that the command is designated to be sent to the RFG 1 toa dedicated intra-board physical layer 208 d connected to the primitivecontrol function co-controller. The dedicated intra-board physical layer208 d of the primitive control function co-controller sends the commandvia a dedicated communication link of a physical communication medium207 c to the switch 212, which transfers the command via a dedicatedcommunication link of a physical communication medium 207 d to adedicated intraboard physical layer 208 a connected to the co-controller1. The dedicated intraboard physical layer 208 a sends the command to aprocessor of the co-controller 1. The processor of the co-controller 1determines from the command and the determination that the command isdesignated to be sent to the RFG 1 that one or more parameters, e.g.,set-points of parameters, parameter values, etc., are to be sent to theRFG 1, and provides a control signal including the one or moreparameters to a dedicated transmitter of a dedicated physical layer 202a connected to the co-controller 1.

The dedicated transmitter of the dedicated physical layer 202 a of theco-controller 1 applies the communication protocol to the one or moreparameters to generate one or more transfer units and sends during theclock cycle CA the one or more transfer units via a dedicatedcommunication link DCL 1 of a physical communication medium 206 a to adedicated receiver of a physical layer 203 a of the RFG 1. The dedicatedreceiver of the physical layer 203 a applies the communication protocolto the one or more transfer units to extract the one or more parametersfrom the one or more transfer units and provides the one or moreparameters to a dedicated processor of the RFG 1. The dedicatedprocessor of the RFG 1 controls an RF power supply of the RFG 1 togenerate an RF signal having one or more set points, e.g., one or morevalues, etc., of the one or more parameters received from theco-controller 1.

The dedicated processor of the RFG 1 generates the informationassociated with one or more parameters and provides the information to adedicated transmitter of the physical layer 203 a of the RFG 1. Thededicated transmitter of the physical layer 203 a of the RFG 1 appliesthe communication protocol to the information associated with one ormore parameters to generate one or more transfer units and communicatesduring the clock cycle CB or the clock cycle CA or another clock cyclethe one or more transfer units via a dedicated communication link DCL 2of the physical communication medium 206 a to a dedicated receiver ofthe dedicated physical layer 202 a connected to the co-controller 1.

The dedicated receiver of the dedicated physical layer 202 a applies thecommunication protocol to extract the information associated with one ormore parameters from the one or more transfer units and provides theinformation to the processor of the co-controller 1. The processor ofthe co-controller 1 provides the information associated with one or moreparameters to the dedicated intraboard physical layer 208 a connected tothe co-controller 1. The dedicated intraboard physical layer 208 a sendsthe information associated with one or more parameters via a dedicatedcommunication link of the physical communication medium 207 d to theswitch 212. The switch 212 transfers the information associated with oneor more parameters via a dedicated communication link of the physicalcommunication medium 207 c to the dedicated intraboard physical layer208 d connected to the primitive control function co-controller. Thededicated intraboard physical layer 208 d provides the informationassociated with one or more parameters to the processor of the primitivecontrol function controller. The processor of the primitive controlfunction controller sends the information associated with one or moreparameters to a dedicated transmitter of the dedicated physical layer202 d connected to the primitive control function controller. Thededicated transmitter of the dedicated physical layer 202 d connected tothe primitive control function controller applies the communicationprotocol to the information associated with one or more parameters togenerate one or more transfer units and sends the one or more transferunits via a dedicated communication link of the physical communicationmedium 207 b to the switch 212. The switch 212 determines from the oneor more transfer units that the one or more transfer units aredesignated to be sent to the master system controller 204, and sends theone or more transfer units via the physical communication medium 207 ato a receiver of the physical layer associated with the master systemcontroller 204. The switch 212 transfers the one or more transfer unitsvia a communication link of the physical communication medium 207 a to areceiver of the physical layer associated with the master systemcontroller 204.

The receiver of the physical layer associated with the master systemcontroller 204 applies the communication protocol to extract theinformation associated with one or more parameters and provides theinformation to the processor of the master system controller 204. Theprocessor of the master system controller 204 determines from theinformation associated with one or more parameters whether to change avalue of the one or more parameters for the same state for which the oneor more parameters were sent previously during the clock cycle CA to theRFG 1 by the co-controller 1. Upon determining to change one or morevalues of one or more parameters, the changed one or more values aresent to via the co-controller 1 to the RFG 1 in a manner similar to thatdescribed above. On the other hand, upon determining not to change thevalues of the one or more parameters, the unchanged values are sent tovia the co-controller 1 to the RFG 1 in a manner similar to thatdescribed above. The co-controller 1 sends the changed or unchangedvalues during the clock cycle CA or any other clock cycle after theclock cycle CA.

In some embodiments, the master system controller 204 communicates withan RFG using transfer control protocol (TCP) or TCP over IP.

In several embodiments, a command is designated by the master systemcontroller 204 to be sent to the RFG 2 or the RFG 3 instead of the RFG1. The command when designated to be sent to the RFG 2 is sent in asimilar manner as that described above as being sent to the RFG 1 exceptthat the command is sent via the physical communication medium 207 a,the switch 212, a dedicated communication link of a physicalcommunication medium 207 e, a dedicated intraboard physical layer 208 bconnected to the co-controller 2, a dedicated communication link of aphysical communication medium 206 b, and a dedicated receiver of aphysical layer 203 b of the RFG 2 to a dedicated processor of the RFG 2.Moreover, a command when designated to be sent to the RFG 3 is sent in asimilar manner as that described above as being sent to the RFG 1 exceptthat the command is sent via the physical communication medium 207 a,the switch 212, a dedicated communication link of a physicalcommunication medium 207 f, a dedicated intraboard physical layer 208 cconnected to the co-controller 3, a dedicated communication link of aphysical communication medium 206 c, and a dedicated receiver of aphysical layer 203 c of the RFG 3 to a dedicated processor of the RFG 3.

In some embodiments, commands are sent from the master system controller204 to all the RFGs 1, 2, and 3, either simultaneously or sequentially.

In various embodiments, the information associated with one or moreparameters is generated by the RFG 2, and sent from a dedicatedtransmitter of the physical layer 203 b via a dedicated communicationlink of the physical communication medium 206 b, a dedicated receiver ofthe physical layer 208 b, the dedicated intraboard physical layer 202 bconnected to the co-controller 2, a dedicated communication link of thephysical communication medium 207 e, the switch 212, and thecommunication link of the physical communication medium 207 a to themaster system controller 204. Moreover, the information associated withone or more parameters is generated by the RFG 3, and sent from adedicated transmitter of the physical layer 203 c via a dedicatedcommunication link of the physical communication medium 206 c, adedicated receiver of the physical layer 202 c, the dedicated intraboardphysical layer 208 c connected to the co-controller 3, a dedicatedcommunication link of the physical communication medium 207 f, theswitch 212, and the communication link of the physical communicationmedium 207 a to the master system controller 204.

In some embodiments, the co-controller 1, the dedicated physical layer202 a, and the dedicated intraboard physical layer 208 a are located ona board 209 a. Moreover, the co-controller 2, the dedicated physicallayer 202 b, and the dedicated intraboard physical layer 208 b arelocated on a board 209 b. Also, the co-controller 3, the dedicatedphysical layer 202 c, and the dedicated intraboard physical layer 208 care located on a board 209 c. The primitive control functionco-controller, the dedicated physical layer 202 d and the dedicatedintraboard physical layer 208 d are located on a board 209 d. Thenon-critical data controller, a physical layer connected to thenon-critical data controller, and a dedicated intraboard physical layerconnected to the non-critical data controller are located on a board 209e. In some embodiments, a board is a printed circuit board.

In various embodiments, a number of boards used within the system 202changes with a number of RF generators used. For example, if the system202 includes the RFG1 and RFG2, the boards 209 a and 209 b are used andthe board 209 c is not used.

In some embodiments, the system 202 excludes the board 209 e andcomponents, e.g., the non-critical data controller, the physical layerconnected to the non-critical data controller, and the dedicatedintraboard physical layer connected to the non-critical data controller,etc.

In various embodiments, each of RFG 1, RFG 2, RFG 3, and the mastersystem controller 204 includes TCP/IP ports and communicate with eachother via the TCP/IP ports.

In some embodiments, the master system controller 204 configures via thephysical layer connected to the master system controller 204 or via aTCP/IP port connected to the master system controller 204, one or moreof the RFGs. For example, the master system controller 204 sends acommand to the RFG 1 via the TCP/IP port connected to the master systemcontroller 204 and a TCP/IP port connected to the RFG 1, and the commandindicates to the physical layer 203 a of the RFG 1 that the informationassociated with one or more parameters is to be sent to theco-controller 1. Moreover, the master system controller 204 sends acommand to the RFG 2 via the TCP/IP port connected to the master systemcontroller 204 and a TCP/IP port connected to the RFG 2, and the commandindicates to the physical layer 203 b of the RFG 2 that the informationassociated with one or more parameters is to be sent to theco-controller 2. The master system controller 204 sends a command to theRFG 3 via the TCP/IP port connected to the master system controller 204and a TCP/IP port connected to the RFG 3, and the command indicates tothe physical layer 203 c of the RFG 3 that the information associatedwith one or more parameters is to be sent to the co-controller 3. Asanother example, each RFG is configured via the physical layer connectedto the master system controller 204 and a shared physical layerconnected to the RFG.

In some embodiments, a dedicated transmitter of a physical layerassociated with, e.g., connected to, etc., a co-controller cannottransmit one or more transfer units to more than one RFG. Similarly, invarious embodiments, a dedicated transmitter of a physical layer of anRFG cannot transmit one or more transfer units to more than oneco-controller. Moreover, in some embodiments, a dedicated receiver of aphysical layer associated with a co-controller cannot receive one ormore transfer units from more than one RFG. In several embodiments, adedicated receiver of a physical layer of an RFG cannot receive one ormore transfer units from more than one co-controller.

In various embodiments, there is a dual push between a dedicatedphysical layer associated with a co-controller and a dedicated physicallayer associated with an RFG, e.g., a physical layer connected to adedicated processor of the RFG. For example, there is no requestgenerated by the co-controller for sending to the dedicated processor ofthe RFG for providing the information associated with one or moreparameters. Once the RFG is configured to transfer the informationassociated with one or more parameters by the master system controller204 or by the co-controller, the dedicated physical layer associatedwith the RFG continuously sends, e.g., without being requested, etc.,one or more transfer units having the information associated with one ormore parameters to the dedicated physical layer associated with theco-controller. The dedicated physical layer associated with the RFGcontinuously sends one or more transfer units having the informationuntil the master system controller 204 or the co-controller sends acommand to the RFG to stop sending the information associated with oneor more parameters. Moreover, there is no request generated by thededicated processor of the RFG for requesting the co-controller to sendone or more set points of one or more parameters. The co-controller isprogrammed to receive the information associated with one or moreparameters from the RFG and analyze the information to determine whetherto modify one or more set points of one or more parameters for sendingto the RFG.

FIG. 2B is a diagram of an embodiment of a system 211 to illustrate thatmultiple co-controllers are located on the same board 213, e.g. aprinted circuit board, etc., instead of on separate boards. In thesystem 211, there is no use of dedicated intraboard physical layers,e.g., intraboard receivers and intraboard transmitters, etc. The system211 is similar to the system 202 (FIG. 2A) except that the system 211includes a host computer system 217, which is an example of thecontroller 20 (FIG. 1A). The host computer system 217 does not have thededicated intraboard physical layers. Moreover, the system 211 does nothave the switch 212. In the system 211, the physical layer that isconnected to the master controller 204 is used to send the command orreceive the information associated with one or more parameters.Moreover, the master controller 204 is connected to the dedicatedphysical layer 202 d via a physical communication medium 219. Instead ofcommunicating with the master system controller 204 via the physicalcommunication medium 207 a (FIG. 2A), the switch 212, and the dedicatedphysical communication medium 207 b (FIG. 2A), the dedicated physicalcommunication medium 219 is used to communicate one or more transferunits between the dedicated physical layer 202 d and the physical layerconnected to the master system controller 204. Also, the system 211 hasa parallel bus 215 that interconnects the co-controller 1, theco-controller 2, the co-controller 3, the primitive control functionco-controller, and the non-critical data controller. Instead ofcommunicating between the co-controllers via the dedicated intraboardphysical layers and the switch 212, the co-controllers of the hostcomputer system 217 communicate with each other via the bus 215.

In some embodiments, the bus 215 is dedicated and customized tocommunicate between the co-controller 1, the co-controller 2, theco-controller 3, the primitive control function co-controller, and thenon-critical data controller. For example, the bus 215 facilitatescommunication between any two of the co-controller 1, the co-controller2, the co-controller 3, the primitive control function co-controller,and the non-critical data controller in an order of nanoseconds. Each ofthe co-controller 1, the co-controller 2, the co-controller 3, theprimitive control function co-controller, and the non-critical datacontroller is connected to a general purpose input/output (GPIO)controller, which further connects to the bus 215 via multiple GPIOpins. The GPIO controller performs various functions, e.g., controllinga rate of communication among the co-controller 1, the co-controller 2,the co-controller 3, the primitive control function co-controller, andthe non-critical data controller based on a bandwidth of the bus 215,negotiating rates of communication between the co-controller 1, theco-controller 2, the co-controller 3, the primitive control functionco-controller, and the non-critical data controller, etc.

In some embodiments, each co-controller and a dedicated physical layerconnected to the co-controller are on a separate board. For example, theco-controller 1 and the dedicated physical layer 202 a are located on afirst printed circuit board, the co-controller 2 and the dedicatedphysical layer 202 b are located on a second printed circuit board, andthe co-controller 3 and the dedicated physical layer 202 c are locatedon a third printed circuit board. Each board is connected to the bus 215via a corresponding GPIO controller and corresponding GPIO pins. Sucharrangement of the boards provides modularity and facilitates connectionand removal of the boards.

In various embodiments, the dedicated physical layer 203 a is locatedwithin the RFG 1, the dedicated physical layer 203 b is located withinthe RFG 2, and the dedicated physical layer 203 c is located within theRFG 3.

FIG. 2C is a diagram of an embodiment of a system 250 to illustratepoint-to-point communication between dedicated intraboard physicallayers 254 a, 254 b, and 254 c and the co-controllers 1, 2, and 3. Thesystem 250 is similar to the system 202 (FIG. 2A) except the system 250excludes the boards 209 d and 209 e (FIG. 2A) and the switch 212 (FIG.2A). In the system 250, each of the dedicated intraboard physical layer254 a, 254 b, and 254 c is connected to the master system controller204. Moreover, the dedicated intraboard physical layer 254 a isconnected to the dedicated intraboard physical layer 208 a via adedicated physical communication medium 256 a, the dedicated intraboardphysical layer 254 b is connected to the dedicated intraboard physicallayer 208 b via a dedicated physical communication medium 256 b, and thededicated intraboard physical layer 254 c is connected to the dedicatedintraboard physical layer 208 c via a dedicated physical communicationmedium 256 c. The boards 209 a, 209 b, and 209 c are located within ahost computer system 252, which is an example of the controller 20 (FIG.1A).

Also, in the system 250, a command is sent from the dedicated intraboardphysical layer 254 a connected to the master system controller 204 viathe dedicated physical communication medium 256 a to the dedicatedintraboard physical layer 208 a, or a command is sent from the dedicatedintraboard physical layer 254 b connected to the master systemcontroller 204 via the dedicated communication medium 256 b to thededicated intraboard physical layer 208 b, and/or a command is sent fromthe dedicated intraboard physical layer 254 c connected to the mastersystem controller 204 via the dedicated physical communication medium256 c to the dedicated intraboard physical layer 208 c. Similarly, inthe system 250 the information associated with one or more parameterswhen received from the RFG 1 is sent from the dedicated intraboardphysical layer 208 a connected to the co-controller 1 via the dedicatedphysical communication medium 256 a to the dedicated intraboard physicallayer 254 a connected to the master system controller 204. Moreover, theinformation associated with one or more parameters when received fromthe RFG 2 is sent from the dedicated intraboard physical layer 208 bconnected to the co-controller 2 via the dedicated physicalcommunication medium 256 b to the dedicated intraboard physical layer254 b connected to the master system controller 204. Also, theinformation associated with one or more parameters when received fromthe RFG 3 is sent from the dedicated intraboard physical layer 208 cconnected to the co-controller 3 via the dedicated physicalcommunication medium 256 c to the dedicated intraboard physical layer254 c connected to the master system controller 204.

In some embodiments, the operations described herein as being performedby the master system controller 204 are performed by the co-controller1, the co-controller 2, or the co-controller 3. For example, instead ofthe master system controller determining whether to trigger an alarmbased on the information associated with one or more parameters receivedfrom the RFG 1, the co-controller makes the determination. As anotherexample, instead of the master system controller 204 applying acomputer-generated model to determine a set point of a parameter to beprovided to the RFG 1, the co-controller 1 makes the determination. Thecomputer-generated model is further described below.

FIG. 3 is a diagram of an embodiment to illustrate a transfer unit 300,e.g., a datagram, a packet, etc. The transfer unit includes a headerfield and a payload field, e.g., a field that includes the informationassociated with one or more parameters for one or more states of an RFsignal, a field that includes a set point of a parameter for the one ormore states, a field that includes a type of a parameter, etc. Examplesof a type of parameter include power, frequency, pulse width of an RFsignal, etc. The header field includes a field for an identity of asource port from which the transfer unit is sent, a field for anidentity of a destination port designated to receive the transfer unit,a field for a combined length of the header and of a payload attached tothe header, and a field for a checksum value.

In various embodiments, the transfer unit 300 is customized, e.g.,generated using the customized protocol, etc., to exclude the sourceport field for identifying the source port and the destination portfield for identifying the destination port. In a point-to-pointcommunication, there is no need for identifying the source port and thedestination port. The exclusion increases data rate between thecontroller 20 and the RFG 22 (FIG. 1A).

In some embodiments, the header is customized, e.g., generated using thecustomized protocol, etc., to exclude the field for the checksum valueand/or the field for the combined length of the header and of thepayload. The exclusion increases data rate between the controller 20 andthe RFG 22.

In various embodiments, the checksum value is generated by atransmitter, e.g., a source port, etc., sending the transfer unit 300.The checksum value is generated from the payload of the transfer unit300, or the header of the transfer unit 300, or a combination thereof.The checksum value is compared to another checksum value that iscalculated by a receiver, e.g., a destination port, etc., of thetransfer unit 300 to determine whether the payload and/or a header ofthe transfer unit 300 changed during a transfer from the transmitter tothe receiver.

In some embodiments, a datagram is embedded within an IP packet, whichis further embedded within an Ethernet packet.

In various embodiments, the transfer unit 300 is customized, e.g.,generated using the customized protocol, etc., such that the fields arein different positions than that shown in FIG. 3. For example, the fieldfor payload is before the field for the length. As another example, thefield for the destination port is before the field for the source portor after the field for the length. The customized protocol is applied bya physical layer that generates one or more of customized transferunits, which are transfer units generated using the customized protocol.

FIG. 4 is a diagram of multiple graphs 402 and 404 to illustratemultiple states S0 through Sn of an RF signal 406, where n is an integergreater than 0. The RF signal 406 is an example of an RF signal that isgenerated by an RF generator. The graph 402 plots a clock signal 408,e.g., a transistor-transistor logic (TTL) signal, etc., versus time t.The graph 404 plots the RF signal 406 versus the time t. The RF signal406 has multiple states S0, S1, S2, S3, S4, and so on until statesS(n−1) and Sn when the clock signal 408 is in a state 1, e.g., a highstate, a high level, etc. For example, the RF signal 406 has eightstates S0 thru S7. As another example, the RF signal 406 has 20 statesS0 thru S20. The multiple states S0 thru Sn correspond to a high stateof the RF signal 406, e.g., power values of the RF signal 406 in each ofthe states is higher than power values of the RF signal 406 when theclock signal 408 is in a state 0, e.g., a low state, a low level, etc.

The RF signal 406 is synchronous to the clock signal 408. For example,when the clock signal 408 is in the high state, the RF signal 406 isalso in the high state, e.g., RF values of the states S0 thru Sn aregreater than RF values of the RF signal 406 when the clock signal is inthe state 0, etc. As another example, when the clock signal 408 is inthe low state, the RF signal 406 is also in the low state, e.g., RFvalues of the RF signal 406 when the clock signal is in the state 1 arelower than RF values of the RF signal in the states S0 thru Sn, etc.

In some embodiments, instead of or in addition to the RF signal 406having multiple states during the high state of the clock signal 408,the RF signal 406 has multiple states during the low state of the clocksignal 408. The RF values of the RF signal 406 having the multiplestates during the low state of the clock signal 408 are lower than theRF values of the RF signal during the high state of the clock signal408.

In several embodiments, one or more states similar to the states S1 thruSn of an RF signal occur when the clock signal 408 is in the state 0.For example, an RF signal has multiple states when the clock signal 408is in the state 1 and has multiple states when the clock signal 408 isin the state 0.

In some embodiments, one or more states similar to the states S1 thru Snof an RF signal occur when the clock signal 408 is in the state 0 andthe states S1 thru Sn of the RF signal do not occur when the clocksignal 408 is in the state 1.

In various embodiments, the RF signal 406 is sinusoidal in form. Forexample, during each state, the RF signal oscillates to form asinusoidal signal.

FIG. 5 is a diagram of an embodiment of a system 500 to illustrate acommunication of data between a local processor board system 510 and anRFG and between the local processor board system 510 and another localprocessor board system 514. The local processor board system 510 is anexample of the board 209 a (FIG. 2A), or the board 209 b (FIG. 2A), orthe board 209 c (FIG. 2A). The local processor board system 514 is anexample of the board 209 d (FIG. 2A). The RFG is an example of the RFG1,or the RFG2, or the RFG3.

The RFG is configured to initiate sending the information associatedwith one or more parameters to the local processor board system 510 viaa physical layer 521 of the RFG. The RFG is configured by the processorof the local processor board system 514 via a shared physical layer 513of the local processor board system 514, a shared communication link ofa physical communication medium 527, and the physical layer 521 of theRFG. For example, the shared physical layer 513 applies thecommunication protocol to configuration information to generate one ormore transfer units. The physical layer 521 receives the one or moretransfer units having the configuration information from the sharedphysical layer 513 via the shared communication link of the physicalcommunication medium 527. The physical layer 521 applies thecommunication protocol to the one or more transfer units having theconfiguration information to extract the configuration information andprovides the configuration information to the dedicated processor of theRFG. The dedicated processor of the RFG determines to initiate sendingthe information associated with one or more parameters upon reading theconfiguration information. Upon determining to send the informationassociated with one or more parameters, the dedicated processor of theRFG sends the information to a dedicated physical layer 523 of the RFGfor applying the communication protocol to generate one or more transferunits.

The shared physical layer 513 and the shared communication link of thephysical communication medium 527 are shared among the RFG1, the RFG2,and the RFG3. For example, the processor of the local processor boardsystem 514 configures a dedicated physical layer of the RFG 1, adedicated physical layer of the RFG 2, and a dedicated physical layer ofthe RFG 3 to initiate sending the information associated with one ormore parameters. The configuration is done by sending configurationcommands from the shared physical layer 513 via the shared communicationlink of the physical communication medium 527 to a physical layer ofeach of the RFG 1, the RFG 2, and the RFG 3. Each of the RFG 1, the RFG2, and the RFG 3 are connected via its corresponding physical layer tothe physical communication medium 527.

Upon being configured by the local processor board system 514, thededicated physical layer 523 of the RFG generates one or more transferunits by applying the UDP or the customized protocol to the informationassociated with one or more parameters. A dedicated transmitter of thededicated physical layer 523 of the RFG pushes, e.g., transfers, etc.,via a dedicated communication link 506 of a physical communicationmedium 507 the one or more transfer units, etc., having the informationassociated with one or more parameters to a dedicated receiver of aphysical layer 502, e.g., a chip, an integrated circuit, etc., of thelocal processor board system 510. Then, a dedicated transmitter of thephysical layer 502 of the local processor board system 510 generates atransfer unit, e.g., the transfer unit 300 (FIG. 3), etc., including oneor more set points, e.g., one or more values, etc., for one or moreparameters. In some embodiments the set points are received by the localprocessor board system 510 from the master system controller 204 (FIG.2A).

The set points are generated based on the information associated withone or more parameters. For example, the information associated with oneor more parameters is compared to a pre-determined range to generate theset points. The set points are generated so the information associatedwith one or more parameters received after the set points are sent tothe RFG are within the pre-determined range. An example of a transferunit that is generated and sent by the dedicated transmitter of thephysical layer 502 is provided in FIG. 6. The one or more set points ofthe one or more parameters are associated with one or more states, e.g.,the states S0 and S1, or the state S0, or the state S1, or the states S0and S1 and S2, or the states S0 thru S2, or the states S0 thru S3, orthe states S0 thru S4, or the states S0 thru S5, or the states S0 thruS(n−1), or the states S0 thru Sn, etc., of an RF signal, etc. Thededicated transmitter of the physical layer 502 sends the transfer unitvia a dedicated communication link 504 of the physical communicationmedium 507 to a dedicated receiver of the physical layer 523 of the RFG,e.g., the RFG 1, etc.

The RFG generates an RF signal having the set points received via thededicated communication link 504. Based on the RF signal, theinformation associated with one or more parameters is generated by theRFG and packaged within one or more transfer units by the dedicatedtransmitter of the physical layer 523. Then, the dedicated receiver ofthe physical layer 502 receives via the dedicated communication link 506of the physical communication medium 507 one or more transfer units,e.g., the transfer unit 300, etc., including the information associatedwith one or more parameters from the dedicated transmitter of thephysical layer 523 of the RFG. An example of a transfer unit that isreceived by the dedicated receiver of the physical layer 502 is providedin FIG. 7.

The dedicated receiver of the physical layer 502 applies thecommunication protocol to extract the information associated with one ormore parameters from a transfer unit and provides the information to aprocessor, e.g., a processor of the co-controller 1, or a processor ofthe co-controller 2, or a processor of the co-controller 3, etc., of thelocal processor board system 510. In some embodiments, when the localprocessor board system 510 has the co-controller 1 integrated therewith,the RFG is the RFG 1 and the physical layer of the RFG is the physicallayer 203 a (FIG. 2A). Moreover, when the local processor board system510 has the co-controller 2 integrated therewith, the RFG is the RFG 2and the physical layer of the RFG is the physical layer 203 b (FIG. 2A).Furthermore, when the local processor board system 510 has theco-controller 3 integrated therewith, the RFG is the RFG 3 and thephysical layer of the RFG is the physical layer 203 c (FIG. 2A).

The processor of the local processor board system 510 determines fromthe information associated with one or more parameters that one or moreset points associated with the one or more states, e.g., the states S0and S1, or the state S0, or the state S1, or the states S0 and S1 andS2, or the states S0 thru S2, or the states S0 thru S3, or the states S0thru S4, or the states S0 thru S5, or the states S0 thru S(n−1), or thestates S0 thru Sn, etc., of an RF signal is to be modified and modifiesthe one or more set points to generate one or more modified set points.

The processor of the local processor board system 510 provides the oneor more modified set points to the dedicated transmitter of the physicallayer 502. The dedicated transmitter of the physical layer 502 appliesthe communication protocol to the one or more modified set points togenerate a transfer unit, e.g., the transfer unit 300, the transfer unitillustrated in FIG. 6, etc., and sends the transfer unit via thededicated communication link 504 to the dedicated receiver of thephysical layer 523 of the RFG. In various embodiments, the one or moremodified set points are received by the local processor board system 510from the master system controller 204.

In some embodiments, there is board-to-board communication between thelocal processor board system 510 and the local processor board system514. As an example, the information associated with one or moreparameters is transferred from a dedicated transmitter Tx2 of a physicallayer 516 that is connected to a co-controller, e.g., the co-controller1, the co-controller 2, the co-controller 3, etc., of the localprocessor board system 510 via a first dedicated communication link of aphysical communication medium 519 to a dedicated receiver of a physicallayer 512 of the local processor board system 514. The dedicatedreceiver of the physical layer 512 sends the information associated withone or more parameters to a co-controller, e.g., the co-controller 1,the co-controller 2, the co-controller 3, the primitive control functionco-controller, etc., that is connected to the physical layers 512 and513. As another example, one or more set points of one or moreparameters are received from the co-controller of the local processorboard system 514 by a dedicated transmitter of the physical layer 512 ofthe local processor board system 514 and sent by the dedicatedtransmitter via a dedicated communication link of the physicalcommunication medium 519 to a dedicated receiver of the physical layer516 of the local processor board system 510.

In some embodiments, the local processor board system 514 includes themaster system controller 204 (FIG. 2A) instead of the co-controller.

In various embodiments, a rate at which a transfer unit is received bythe dedicated receiver of the physical layer 502 of the local processorboard system 510 from the dedicated transmitter of the physical layer523 of the RFG is greater than or equal to a rate at which a transferunit is sent from the dedicated transmitter of the physical layer 502 tothe dedicated receiver of the physical layer 523 of the RFG. Suchmatched or increased rate of reception facilitates the processor of thelocal processor board system 510 to determine whether one or more valuesof one or more parameters for one or more states is to be changed basedon the information associated with one or more parameters in a transferunit received from the dedicated transmitter of the physical layer 523of the RFG.

In some embodiments, a rate at which a transfer unit is received by thededicated receiver of the physical layer 502 from the dedicatedtransmitter of the physical layer 523 of the RFG is less than a rate atwhich a transfer unit is sent from the dedicated transmitter of thelocal processor board system 510 to the dedicated receiver of thephysical layer 523 of the RFG.

In an embodiment, a dedicated transmitter, e.g., the transmitter of thephysical layer 502 of the local processor board system 510, thededicated transmitter of the physical layer 523 of the RFG, etc.,generates a burst transfer unit, e.g., a burst packet, a burst frame,etc., by combining multiple transfer units to generate a series oftransfer units. The burst transfer unit reduces overhead for eachtransfer unit and achieves higher data rates compared to sendingtransfer units separately. For example, indication of an identity of asource port and a destination port in each transfer unit is notnecessary. In this example, a source port and/or a destination port isindicated for multiple transfer units that are combined. As anotherexample, in case of a burst transfer unit, a header for each packetwithin the burst transfer unit is not needed, e.g., a separation bitindicating a beginning and an end of a packet is not needed, etc. Forexample, in case of a frame of a burst transfer unit, a header is usedbefore a first packet in the frame, and the remaining packets in theframe do not have a header. The header before the first packet indicateda start of the frame. Such reduction in payload saves time and increasesdata transfer rate.

Moreover, a time taken by a dedicated transmitter of the local processorboard system 510 to generate and combine multiple transfer units allowsthe processor of the local processor board system 510 or the mastersystem controller 204 to generate a model of a portion of the plasmasystem 10 (FIG. 1A) and/or to calculate output data at an output of themodel. A model of a portion, e.g., the RF cable 16 (FIG. 1A), the IMC 14(FIG. 1A), the RF transmission line 12 (FIG. 1A), the chuck 18 (FIG.1A), a combination of the RF cable 16 and the IMC 14, a combination ofthe RF cable 16 and the IMC 14 and the RF transmission line 12, or acombination of the RF cable 16 and the IMC 14 and the RF transmissionline 12 and the chuck 18, etc., of the plasma system 10 is stored amemory device of the local processor board system 510 or in a memorydevice of the master system controller 204. The model has similarcharacteristics, e.g., capacitances, inductances, complex power, complexvoltage and currents, etc., as that of the portion of the plasma system10. For example, a model has the same number of capacitors and/orinductors as that within the portion of the plasma system 10, and thecapacitors and/or inductors are connected with each other in the samemanner, e.g., serial, parallel, etc. as that within the portion of theplasma system 10. To provide an illustration, when the IMC 14 includes acapacitor coupled in series with an inductor, a model of the IMC 14 alsoincludes the capacitor coupled in series with the inductor.

As another example, the portion of the plasma system 10 includes one ormore electrical components and the model is a design, e.g., acomputer-generated model, etc., of the portion. In some embodiments, thecomputer-generated model is generated by the processor of the localprocessor board system 510 or of the master system controller 204 basedupon input signals received from a user via an input hardware unit. Theinput signals include signals regarding which electrical components,e.g., capacitors, inductors, etc., to include in a model and a manner,e.g., series, parallel, etc., of coupling the electrical components witheach other. As yet another example, the portion of the plasma system 10includes hardware electrical components and hardware connections betweenthe electrical components and the model includes softwarerepresentations of the hardware electrical components and of thehardware connections. As used herein, examples of electrical componentsinclude resistors, capacitors, and inductors.

In some embodiments, the processor of the master system controller 204or of the local processor board system 510 generates output data at anoutput of a model based on data input to the model and characteristicsof components of the model. For example, a directional sum of complexvoltages of electrical components of a model and a complex voltage at aninput node of the model is calculated by the processor of the mastersystem controller 204 or of the local processor board system 510 tocalculate a complex voltage at an output node of the model. The complexvoltage at the input node is an example of the information associatedwith one or more parameters. As another example, a directional sum ofcomplex currents of electrical components of the model and a complexcurrent at an input node of the model is calculated by the processor ofthe master system controller 204 or of the local processor board system510 to calculate a complex current at an output node of the model. Thecomplex current at the input node is an example of the informationassociated with one or more parameters. It should be noted that in someembodiments, the processor of the master system controller 204 or of thelocal processor board system 510 calculates a complex voltage, a complexcurrent, or a complex voltage and current from the informationassociated with one or more parameters. Examples of an input at an inputnode of the model include the information associated with one or moreparameters received from the RFG by a dedicated receiver of the physicallayer 502. An output at an output node is used by the processor of themaster system controller 204 or of the local processor board system 510to determine whether to change a value of a parameter for one or morestates, e.g., any of states S0 thru S7, etc., of an RF signal during aclock cycle, e.g., the clock cycle CC, the clock cycle CA, the clockcycle CB, etc.

In various embodiments, the processor of the master system controller204 or of the local processor board system 510 decimates data from theinformation associated with one or more parameters to reduce an amountof the information. For example, the processor of the master systemcontroller 204 or of the local processor board system 510 applies astatistical operation, such as, for example, an insertion sortoperation, or a merge sort operation, or a moving interquartile range(IQR) calculation operation, or an interquartile range calculationoperation, or a maximum value calculation operation, or a minimum valuecalculation operation, or a mean value calculation operation, or amedian value calculation method, or a variance value calculation method,or a standard deviation value calculation method, or a moving mean valuecalculation method, or a moving median value calculation method, or amoving variance value calculation method, or a moving standard deviationvalue calculation method, or a mode, or a moving mode, or a combinationthereof, etc., to the information associated with one or more parametersto generate a first statistical value from multiple values of theinformation associated with one or more parameters. The processor of themaster system controller 204 or of the local processor board system 510compares the first statistical value with a second statistical valuegenerated, by the processor, from one or more set points sent during aprevious clock cycle, e.g., the clock cycle CA, etc. Upon determiningthat the first statistical value is not within a pre-determined rangefrom the second statistical value, the processor of the master systemcontroller 204 or of the local processor board system 510 changes one ormore set points of one or more parameters to achieve the firststatistical value and sends the one or more changed set points in amanner described above to the RFG. On the other hand, upon determiningthat the first statistical value is within the pre-determined range fromthe second statistical value, the processor of the master systemcontroller 204 or of the local processor board system 510 does notchange one or more set points of one or more parameters and re-sends theone or more set points to the RFG.

In various embodiments, the first statistical value is used by theprocessor of the master system controller 204 or of the local processorboard system 510 to determine whether to generate alarm data. Forexample, upon determining that the first statistical value is not withinthe pre-determined range from the second statistical value, theprocessor of the master system controller 204 or of the local processorboard system 510 generates alarm data. On the other hand, upondetermining that the first statistical value is within thepre-determined range from the second statistical value, the processor ofthe master controller system 204 or of the local processor board system510 does not generate the alarm data. The alarm data is rendered by theprocessor of the master system controller 204 or of the local processorboard system 510 for display on a display device or by other mechanismsdescribed above.

In some embodiments, a value of a parameter for a first state, e.g., thestate S0, etc., of an RF signal is communicated from a controller to anRFG using a different transfer unit than a transfer unit used tocommunicate a value of the parameter for a second state, e.g., the stateS1, etc. In this embodiment, information associated with the parameterfor the first state is communicated from the RFG to the controller usinga different transfer unit than a transfer unit used to communicateinformation associated with the parameter for the second state.

In various embodiments, a value of a parameter for a first set ofstates, e.g., the states S0 and/or S1, etc., of an RF signal iscommunicated from a controller to an RFG using a different transfer unitthan a transfer unit used to communicate a value of the parameter for asecond set of states, e.g., the states S2, S3, and/or S4, etc. In thisembodiment, information associated with the parameter for the first setof states is communicated from the RFG to the controller using adifferent transfer unit than a transfer unit used to communicateinformation associated with the parameter for the second set of states.

In some embodiments, instead of board-to-board communication between thephysical layers 512 and 516, communication between the physical layers512 and 516 occurs via the switch 212 (FIG. 2A).

In several embodiments, the shared physical layer 513 is located on thelocal processor board system 510 instead of on the local processor boardsystem 514. For example, the co-controller of the local processor boardsystem 510 configures the dedicated physical layer 523 of the RFG viathe shared communication link of the physical communication medium 527and the physical layer 521.

FIG. 6 is an embodiment of a datagram that is sent from a physical layerassociated with a co-controller, e.g., the physical layer 202 a, or thephysical layer 202 b, or the physical layer 202 c (FIG. 2A), etc., to aphysical layer of an RFG, e.g., the physical layer 203 a, or thephysical layer 203 b, or the physical layer 203 c (FIG. 2A), etc. Thedatagram includes power and frequency set points for the states S0 thruSn of an RF signal. Each set point translates into a number of bytes,e.g., M bytes, where M is an integer. For example, M is 4 or 8 or 16 or32 or 64, etc. The value of M depends on a speed of processing by aprocessor, e.g., the co-controller 1, the co-controller 2, theco-controller 3, etc., and/or of the dedicated physical layer coupled tothe co-controller.

In various embodiments, in addition to or instead of providing the powerand frequency set points, a pulse width is provided as a set point for astate of an RF signal. For example, for eight states of an RF signal,eight different pulse widths of the RF signal are provided as eight setpoints.

In some embodiments, multiple frequency set points for the states S1through Sn are calculated by the controller 20 using acomputer-generated model of the IMC 14 (FIG. 1A). For a given impedanceZo at an output of the computer-generated model of the IMC and acapacitance value C1 of one or more variable capacitors of thecomputer-generated model of the IMC, each of the multiple frequency setpoints is calculated to achieve a minimum value of a parameter, e.g., areflection coefficient, reflected power, etc., at an input of thecomputer-generated model of the IMC 14. For example, for the state S1,for the given impedance Zo and the capacitance value C1 of the one ormore variable capacitors, a frequency set point f1 at which the RFG 22is to be operated is calculated to achieve a minimum value Γ1 of areflection coefficient at the input of the computer-generated model ofthe IMC 14. As another example, for the state S2, for the givenimpedance Zo and the capacitance value C1 of the one or more variablecapacitors, a frequency set point f2 at which the RFG 22 is to beoperated is calculated to achieve a minimum value Γ2 of a reflectioncoefficient at the input of the computer-generated model of the IMC 14.The impedance at the output of the computer-generated model of the IMC14 is calculated from an impedance measured, by a sensor, at an outputof the RFG 22 (FIG. 1A) and from values of elements of thecomputer-generated model of the IMC 14. The multiple frequency setpoints are sent in a block, e.g., a frame, one or more transfer units,etc., from the controller 20 to the RFG 22 via the dedicatedcommunication link 30 (FIG. 1A) so that the RFG 22 operates using themultiple frequency set points at a fast rate to achieve the minimumvalues of the reflection coefficients. For example, when the RFG 22 is ay megahertz RF generator and another RF generator connected to the IMC14 is an x1 kilohertz or x2 megahertz RF generator or y MHz RFgenerator, the RFG 22 cycles through the states S1 thru Sn during acycle of operation of the x1 kilohertz or the x2 megahertz RF generatoror the y megahertz RF generator. Examples of the y megahertz RFgenerator include a 60 megahertz RF generator or a 27 megahertz RFgenerator. An example of the x1 kilohertz RF generator includes a 400kilohertz RF generator. An example of the x2 megahertz RF generatorincludes a 2 megahertz RF generator. An example of the y megahertz RFgenerator includes a 27 megahertz RF generator.

FIG. 7 shows an embodiment of the burst transfer unit, e.g., a frame,etc., that include multiple transfer units, e.g., multiple sub-packets,etc., including the information associated with one or more parametersfor sending from the RFG 22 (FIG. 1A) to the controller 20 for beingmonitored by the controller 20 (FIG. 1A). For example, information 1within a sub-packet 1 is power that is delivered by the RFG 22,information 2 within the sub-packet 1 is a real part of gamma determinedfrom an RF signal that is delivered by the RFG 22 to the IMC 14,information 3 within the sub-packet 1 is an imaginary part of the gamma,information 4 within the sub-packet 1 is an amount of time elapsed sincea clock edge of a clock signal occurred, information 5 within thesub-packet 1 is a tune frequency of an RF signal that is supplied by theRFG 22 to the IMC 14, information 6 within the sub-packet 1 is aninternal set point of the RFG 22, information 7 within the sub-packet 1is a time stamp, information 8 within the sub-packet 1 is the statusvector, information 9 within the sub-packet 1 is a root mean squarevoltage at a second harmonic frequency of an RF signal that is deliveredby the RFG 22, information 10 within the sub-packet 1 is a root meansquare current at the second harmonic frequency, information 11 withinthe sub-packet 1 is a voltage at a third harmonic frequency of the RFsignal, information 12 within the sub-packet 1 is a current at the thirdharmonic frequency, information 13 within the sub-packet 1 is a voltageat a fourth harmonic frequency of the RF signal, and information 14within the sub-packet 1 is a current at the fourth harmonic frequency,etc. In this example, the information 1 thru 14 are values of differentparameters for the same state of an RF signal. The power that isdelivered by the RFG 22 is measured by a power sensor located within theRFG 22 and coupled to an output of the RFG 22 at which an RF signalhaving the power is delivered to the IMC 14. In some embodiments, thepower that is delivered by the RFG 22 is provided as a set point by thecontroller 20 to the RFG 22. Examples of the internal set point of theRFG 22 include a power set point that is received from the controller 20or a frequency set point that is received from the controller 20.Examples of the time stamp include a time at which a fault occurred, ora time at which a state of an RF signal changed, etc. In someembodiments, the voltages and currents at the harmonic frequencies aremeasured by a voltage and current sensor that is connected to the outputof the RFG 22.

As another example, the information 1 is a value of a parameter for thestate S0, the information 2 is a value of the parameter for the state S1of an RF signal, the information 3 is a value of the parameter for thestate S2 of the RF signal, the information 4 is a value of the parameterfor the state S3 of the RF signal, the information 5 is a value of theparameter for the state S4 of the RF signal, the information 6 is avalue of the parameter for the state S5 of the RF signal, theinformation 7 is a value of the parameter for the state S6 of the RFsignal, the information 8 is a value of the parameter for the state S7of the RF signal, the information 9 is a value of the parameter for thestate S8 of the RF signal, the information 10 is a value of theparameter for the state S9 of the RF signal, the information 11 is avalue of the parameter for the state S10 of the RF signal, theinformation 12 is a value of the parameter for the state S11 of the RFsignal, the information 13 is a value of the parameter for the state S12of the RF signal, the information 14 is a value of the parameter for thestate S13 of the RF signal. In this example, the information pieces 1thru 14 are values of the same parameter for different states of the RFsignal.

The multiple transfer units, e.g., multiple sub-packets etc., are sentin the burst mode in the frame in which the information 1 thru 14 issent from a physical layer of the RFG 22 to a physical layer of thecontroller 20. Each of information 1 thru 14 translates into a number ofbytes, e.g., M bytes, etc. The value of M depends on a speed ofprocessing by a processor, e.g., a dedicated processor of the RFG 1, adedicated processor of the RFG 2, a dedicated processor of the RFG 3,etc., and/or of the dedicated physical layer coupled to the dedicatedprocessor.

In various embodiments, the sub-packet includes p pieces of information,e.g., 12 pieces, 13 pieces, etc., where p is an integer greater thanzero.

In some embodiments, a burst transfer unit is sent from the controller20 to the RFG 22 (FIG. 1A). The burst transfer unit sent from thecontroller 20 to the RFG 22 has a similar format to that of the bursttransfer unit illustrated in FIG. 7 in that the burst transfer unitincludes multiple packets, e.g., datagrams, etc.

FIG. 8 is a graph 802 to illustrate a change in a parameter of an RFsignal within an RF pulse of the RF signal. The graph 802 includes aplot 806 of values of power of an RF signal to be generated versus timet, a plot 804 of values of frequency of the RF signal versus time, and aplot 808 of a clock signal. The graph 802 shows an example of a transferunit received by the dedicated physical layer 21 (FIG. 1A) of the RFG 22from the dedicated physical layer 23 (FIG. 1A) of the controller 20 andsampling of the transfer unit by the dedicated receiver of the dedicatedphysical layer 21 to extract the one or more parameters. For example,the graph 804 shows an example of a transfer unit received by thededicated physical layer 203 a (FIG. 2A) connected to the RFG 1 from thededicated physical layer 202 a (FIG. 2A) connected to the co-controller1 of the controller 20. The dedicated transmitter of the physical layer23 creates a transfer unit that includes values of a parameter for thestates S0 thru S7 of an RF signal. It should be noted that a point Ashown in the graph 802 corresponds to the state S0 of an RF signal, apoint B corresponds to the state S1 of the RF signal, a point Ccorresponds to the state S2 of the RF signal, a point D corresponds tothe state S3 of the RF signal, a point E corresponds to the state S4 ofthe RF signal, a point F corresponds to the state S5 of the RF signal, apoint G corresponds to the state S6 of the RF signal, and a point Hcorresponds to the state S7 of the RF signal. In some embodiments, anyother number of states of an RF signal are used in the graph 802.

Both a power set point for the state S0 of the RF signal and a frequencyset point for the state S0 are sampled at the point A by the dedicatedreceiver of the dedicated physical layer 21 of the RFG 22, a power setpoint for the state S1 of the RF signal and a frequency set point forthe state S1 are sampled at the point B by the dedicated receiver of thededicated physical layer 21 of the RFG 22, a power set point for thestate S2 of the RF signal and a frequency set point for the state S2 aresampled at the point C by the dedicated receiver of the dedicatedphysical layer 21 of the RFG 22, a power set point for the state S3 ofthe RF signal and a frequency set point for the state S3 are sampled atthe point D by the dedicated receiver of the dedicated physical layer 21of the RFG 22, a power set point for the state S4 of the RF signal and afrequency set point for the state S4 are sampled at the point E by thededicated receiver of the dedicated physical layer 21 of the RFG 22, apower set point for the state S5 of the RF signal and a frequency setpoint for the state S5 are sampled at the point F by the dedicatedreceiver of the dedicated physical layer 21 of the RFG 22, a power setpoint for the state S6 of the RF signal and a frequency set point forthe state S6 are sampled at the point G by the dedicated receiver of thededicated physical layer 21 of the RFG 22, and a power set point for thestate S7 of the RF signal and a frequency set point for the state S7 aresampled at the point H by the dedicated receiver of the dedicatedphysical layer 21 of the RFG 22. At an end of a clock cycle of the clocksignal, the dedicated transmitter of the dedicated physical layer 23 ofthe controller pushes the transfer unit to a dedicated receiver of thededicated physical layer 21 of the RFG 22 via the dedicatedcommunication link 30 (FIG. 1A) of the physical communication medium 31(FIG. 1A). In some embodiments, a transfer unit is pushed at an end ofeach clock cycle.

FIG. 9 is a flowchart of an embodiment of a method to illustrate a pushof one or more transfer units by using the communication protocolbetween dedicated transmitters of the RFG 22 and the controller 20. Asshown in FIG. 9, the RFG 22 includes one or more inter-pulse transitioncontrollers to control frequencies during a transition state between twoconsecutive states of an RF signal that is generated by the RFG 22. Forexample, an inter-pulse transition controller provides frequencies of anRF signal to be generated by an RF power supply of the RFG 22 for a timeperiod in which the RF signal transitions from one state to anotherconsecutive state. Moreover, as shown in FIG. 9, the RFG 22 includes oneor more inter-pulse transition controllers to control amounts of powerduring a transition state between two consecutive states of an RF signalthat is generated by the RFG 22. For example, an inter-pulse transitioncontroller provides power amounts of an RF signal to be generated by anRF power supply of the RFG 22 for a time period in which the RF signaltransitions from one state to another consecutive state. Moreover, theRFG 22 includes one or more AFTs to control frequencies during thestates S1 through Sn of an RF signal that is generated by the RFG 22.For example, an AFT provides frequencies of an RF signal to be generatedby an RF power supply of the RFG 22 when the RF signal is in the stateS0 or the state S1. Also, the RFG 22 includes one or more intra-pulsepower controllers to control power amounts during the states S0 throughSn of an RF signal that is generated by the RFG 22. For example, anintra-pulse power controller provides power amounts of an RF signal tobe generated by an RF power supply of the RFG 22 for a period of time inwhich the RF signal is in the state S(n−1) or the state Sn.

During the burst mode, the information associated with one or moreparameters, e.g., a frequency of an RF signal during a time the RFsignal is transitioning from one state to another consecutive state, apower of the RF signal during a time the RF signal is transitioningbetween the two consecutive states, a frequency of the RF signal duringa time the RF signal is in the state S(n−1) or the state Sn, and a powerof the RF signal during a time the RF signal is in the state S(n−1) orthe state Sn, etc., is embedded within one or more transfer units by thededicated transmitter of the RFG 22 and sent from the dedicatedtransmitter of the physical layer 21 of the RFG 22 via the dedicatedcommunication link 32 to the dedicated receiver of the controller 20,e.g., the dedicated receiver of the physical layer 23 of the controller20. The dedicated receiver of the physical layer 23 of the controller 20applies the communication protocol to extract the information associatedwith one or more parameters, and provides the information to aco-controller, e.g., the co-controller 1, etc., that is associated withthe RFG 22. For example, the co-controller 1 is connected to and soassociated with the RFG 1. As another example, the co-controller 2 isconnected to and so associated with the RFG 2, and the co-controller 3is connected to and so associated with the RFG 3.

The co-controller provides the information associated with one or moreparameters to the master system controller 204 (FIGS. 2A-2C) in a mannerdescribed above. The master system controller 204 applies the model ofthe portion of the plasma system 10 to the information associated withone or more parameters to generate one or more set points for the one ormore parameters in a manner described above. In some embodiments, themaster system controller 204 determines whether to generate the alarmdata based on the information associated with one or more parametersand/or whether to change one or more set points for the one or moreparameters based on the information. The dedicated transmitter of thephysical layer 23 of the controller 20, e.g., the dedicated transmitterof the physical layer 202 a (FIG. 2A) connected to the co-controller 1of the controller 20, etc., receives one or more set points for one ormore parameters from the master system controller 204 in a mannerdescribed above, and applies the communication protocol to generate oneor more transfer units that include the one or more set points. The oneor more transfer units are sent from the dedicated transmitter of thephysical layer 23 of the controller 20 via the dedicated communicationlink 30 of the physical communication medium 31 to the dedicatedreceiver of the physical layer 21 of the RFG 22, e.g., the dedicatedreceiver of the physical layer 203 a of the RFG 1 connected theco-controller 1, etc.

The dedicated receiver of the physical layer 21 of the RFG 22 receivesthe one or more transfer units and applies the communication protocol tothe one or more transfer units to parse the one or more transfer unitsand extract one or more set points for one or more parameters forproviding to the dedicated processor of the RFG 22. The one or more setpoints are analyzed by the dedicated processor of the RFG 22 todetermine whether the set point is a frequency of an RF signal to begenerated during a transition between two consecutive states, or a powerof the RF signal to be generated during the transition, or a power ofthe RF signal to be generated during the state S(n−1) or Sn, or afrequency of the RF signal to be generated during the state S(n−1) orSn. Based on the determination, the dedicated processor of the RFG 22provides the frequency set point for the transition to an inter-pulsetransition frequency controller of the RFG 22, provides the power setpoint for the transition to an inter-pulse transition power controllerof the RFG 22, provides the frequency set point to be applied during astate to an AFT of the RFG 22, and provides the power set points to beapplied during the state to an intra-pulse power controller of the RFG22. The RF power supply of the RFG 22 receives the frequency set pointfor the transition from an inter-pulse transition frequency controllerof the RFG 22, the power set point for the transition from anotherinter-pulse transition power controller of the RFG 22, the frequency setpoint for the state S(n−1) or Sn from an AFT of the RFG 22, and thepower set point for the state S(n−1) or Sn from an intra-pulse powercontroller of the RFG 22 to generate an RF signal having the frequencyset point during the transition, the power set point during thetransition, the frequency set point for the state S(n−1) or Sn, and thepower set point for the state S(n−1) or Sn.

FIG. 10A is a diagram to illustrate an embodiment of a method forchanging a value of a parameter for a state by analyzing the informationassociated with one or more parameters for the state. The method isillustrated using a graph 1002 and a table 1008. The graph 1002 includesa plot 1006 of transfer units versus time t, which is measured using aclock signal.

A processor of the controller 20, e.g., a processor of the co-controller1, a processor of the co-controller 2, a processor of the co-controller3, a processor of the master system controller 204, etc., processes avalue of a parameter that is generated from the information associatedwith one or more parameters received within a transfer unit 1R by thededicated receiver of the dedicated physical layer 23 (FIG. 1A) of thecontroller 20 while the dedicated receiver of the controller 20 receiveswithin a transfer unit 2R the information associated with one or moreparameters from the dedicated transmitter of the physical layer 21 ofthe RFG 22. For example, the co-controller 1 or the master systemcontroller 204 processes a value of a parameter that is generated fromthe transfer unit 1R received by the dedicated receiver of the physicallayer 202 a (FIG. 2A) from the dedicated transmitter of the physicallayer 203 a (FIG. 2A) associated with the RFG 1 via a dedicatedcommunication link of the physical communication medium 206 a (FIG. 2A)while the dedicated receiver of the physical layer 202 a receives thetransfer unit 2R via the dedicated communication link from the dedicatedtransmitter connected to the RFG 1. The processor of the controller 20determines based on a value of a parameter that is generated from theinformation associated with one or more parameters received within thetransfer unit 1R that a value of the parameter to be sent to the RFG 22within a transfer unit 3S is to be changed, e.g., indicated as a changefrom the transfer unit 3S to a transfer unit 3S′ in the table 1008. Thechanged parameter is embedded within the transfer unit 3S′ by thededicated transmitter of the physical layer 23 of the controller 20 andsent via the dedicated communication link 30 of the physicalcommunication medium 31 to the dedicated receiver of the physical layer21 of the RFG 22. For example, the changed parameter is embedded withinthe transfer unit 3S′ by the dedicated transmitter of the physical layer202 a connected to the co-controller 1 and sent via the dedicatedcommunication link of the physical communication medium 206 a to thededicated receiver of the physical layer 203 a associated with the RFG1.

Similarly, the processor of the host computer system 200 processes avalue of a parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 2R by thededicated receiver of the physical layer 23 of the controller 20 whilethe dedicated receiver of the physical layer 23 receives within atransfer unit 3R the information associated with one or more parametersfrom the dedicated transmitter of the physical layer 21 of the RFG 22.The processor of the controller 20 determines based on the value of theparameter that is generated from the information associated with one ormore parameters received within the transfer unit 2R that a value of aparameter to be sent to the RFG within a transfer unit 4S is to bechanged e.g., indicated as a change from 4S to 4S′ in the table 1008,etc. The changed parameter is embedded within the transfer unit 4S′ bythe dedicated transmitter of the physical layer 23 of the controller 20and sent via the dedicated communication link 30 of the physicalcommunication medium 31 (FIG. 1A) to the dedicated physical layer 21 ofthe RFG 22.

Moreover, similarly, the processor of the host computer system 200processes a value of a parameter that is generated from the informationassociated with one or more parameters received within the transfer unit3R by the dedicated receiver of the physical layer 23 of the controller20 while the dedicated receiver of the physical layer 23 receives withina transfer unit 4R the information associated with one or moreparameters from the dedicated transmitter of the physical layer 21 ofthe RFG 22. The processor of the host computer system 200 determinesbased on the value of the parameter that is generated from theinformation associated with one or more parameters received within thetransfer unit 3R that a value of a parameter to be sent to the RFGwithin a transfer unit 5S is to be changed e.g., indicated as a changefrom 5S to 5S′ in the table 1008, etc. The changed parameter is embeddedwithin the transfer unit 5S′ by the dedicated transmitter of thephysical layer 23 of the controller 20 and sent via the dedicatedcommunication link 30 of the physical communication medium 31 to thededicated physical layer 21 of the RFG 22.

Also, similarly, the processor of the host computer system 200 processesa value of a parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 4R by thededicated receiver of the physical layer 23 of the controller 20 whilethe dedicated receiver of the physical layer 23 receives within atransfer unit 5R the information associated with one or more parametersfrom the dedicated transmitter of the physical layer 21 of the RFG 22.The processor of the host computer system 200 determines based on thevalue of the parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 4R that avalue of a parameter to be sent to the RFG within a transfer unit 6S isto be changed e.g., indicated as a change from 6S to 6S′ in the table1008, etc. The changed parameter is embedded within the transfer unit6S′ by the dedicated transmitter of the physical layer 23 of thecontroller 20 and sent via the dedicated communication link 30 of thephysical communication medium 31 to the dedicated physical layer 21 ofthe RFG 22.

In some embodiments, there is a fixed delay between receiving thetransfer unit 1R and sending the transfer unit 3S′, between receivingthe transfer unit 2R and sending the transfer unit 4S′, betweenreceiving the transfer unit 3R and sending the transfer unit 5S′, andbetween receiving the transfer unit 4R and sending the transfer unit6S′.

FIG. 10B is a diagram to illustrate an embodiment of a method forchanging a value of a parameter for a state by analyzing the informationassociated with one or more parameters for the state. The method isillustrated using a graph 1020 and a table 1022. The graph 1020 includesa plot 1024 of transfer units versus the time t.

A processor of the controller 20, e.g., a processor of the co-controller1, a processor of the co-controller 2, a processor of the co-controller3, a processor of the master system controller 204, etc., processes avalue of a parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 1R by thededicated receiver of the dedicated physical layer 23 (FIG. 1A) of thecontroller 20 before the dedicated receiver of the controller 20receives within the transfer unit 2R the information associated with oneor more parameters from the dedicated transmitter of the physical layer21 of the RFG 22. For example, the co-controller 1 or the master systemcontroller 204 processes a value of a parameter that is generated fromthe transfer unit 1R received by the dedicated receiver of the physicallayer 202 a (FIG. 2A) from the dedicated transmitter of the physicallayer 203 a (FIG. 2A) associated with the RFG 1 via a dedicatedcommunication link of the physical communication medium 206 a (FIG. 2A)before the dedicated receiver connected to the co-controller 1 receivesthe transfer unit 2R via the dedicated communication link from thededicated transmitter associated with the RFG 1. The processor of thecontroller 20 determines based on a value of a parameter that isgenerated from the information associated with one or more parametersreceived within the transfer unit 1R that a value of the parameter to besent to the RFG 22 within the transfer unit 3S is to be changed, e.g.,indicated as a change from the transfer unit 3S to a transfer unit 3S′in the table 1022, etc. The changed parameter is embedded within thetransfer unit 3S′ by a dedicated transmitter of the physical layer 23 ofthe controller 20 and sent via the dedicated communication link 30 ofthe physical communication medium 31 to the dedicated receiver of thephysical layer 21 of the RFG 22. For example, the changed parameter isembedded within the transfer unit 3S′ by the dedicated transmitter ofthe physical layer 202 a connected to the co-controller 1 and sent viathe dedicated communication link of the physical communication medium206 a to the dedicated receiver of the physical layer 203 a associatedwith the RFG 1.

Similarly, the processor of the host computer system 200 processes avalue of a parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 2R by thededicated receiver of the physical layer 23 of the controller 20 beforethe dedicated receiver of the physical layer 23 receives within thetransfer unit 3R the information associated with one or more parametersfrom the dedicated transmitter of the physical layer 21 of the RFG 22.The processor of the controller 20 determines based on the value of theparameter that is generated from the information associated with one ormore parameters received within the transfer unit 2R that a value of aparameter to be sent to the RFG within the transfer unit 4S is to bechanged e.g., indicated as a change from 4S to 4S′ in the table 1022,etc. The changed parameter is embedded within the transfer unit 4S′ bythe dedicated transmitter of the physical layer 23 of the controller 20and sent via the dedicated communication link 30 of the physicalcommunication medium 31 (FIG. 1A) to the dedicated physical layer 21 ofthe RFG 22.

Moreover, similarly, the processor of the host computer system 200processes a value of a parameter that is generated from the informationassociated with one or more parameters received within the transfer unit3R by the dedicated receiver of the physical layer 23 of the controller20 before the dedicated receiver of the physical layer 23 receiveswithin the transfer unit 4R the information associated with one or moreparameters from the dedicated transmitter of the physical layer 21 ofthe RFG 22. The processor of the controller 20 determines based on thevalue of the parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 3R that avalue of a parameter to be sent to the RFG 22 within the transfer unit5S is to be changed e.g., indicated as a change from 5S to 5S′ in thetable 1022, etc. The changed parameter is embedded within the transferunit 5S′ by the dedicated transmitter of the physical layer 23 of thecontroller 20 and sent via the dedicated communication link 30 of thephysical communication medium 31 to the dedicated physical layer 21 ofthe RFG 22.

Also, similarly, the processor of the host computer system 200 processesa value of a parameter that is generated from the information associatedwith one or more parameters received within the transfer unit 4R by thededicated receiver of the physical layer 23 of the controller 20 beforethe dedicated receiver of the physical layer 23 receives within thetransfer unit 5R the information associated with one or more parametersfrom the dedicated transmitter of the physical layer 21 of the RFG 22.The processor of the controller 20 determines based on the value of theparameter that is generated from the information associated with one ormore parameters received within the transfer unit 4R that a value of aparameter to be sent to the RFG 22 within the transfer unit 6S is to bechanged e.g., indicated as a change from 6S to 6S′ in the table 1022,etc. The changed parameter is embedded within the transfer unit 6S′ bythe dedicated transmitter of the physical layer 23 of the controller 20and sent via the dedicated communication link 30 of the physicalcommunication medium 31 to the dedicated physical layer 21 of the RFG22.

It should be noted that the transfer unit (x+1)R is received consecutiveto the transfer unit xR, where x is an integer greater than zero. Forexample, there is no transfer unit received by a receiver between thetransfer units 1R and 2R. Similarly, it should be noted that thetransfer unit (x+1)S is sent consecutive to the transfer unit xS. Forexample, there is no transfer unit sent by a transmitter between thetransfer units 3S and 4S.

In some embodiments, the transfer unit 2R is not received after thetransfer unit 3S′ is sent. For example, the transfer unit 3S′ includes aparameter indicating that an RFG is to be shut down, e.g., operate atzero power, etc. In this case, the transfer unit 2R is not received bythe host computer system 200.

It should further be noted that although the above-described embodimentsrelate to providing a modified RF signal to a lower electrode of thechuck 18 (FIG. 1A) and grounding the upper electrode 26 (FIG. 1A), inseveral embodiments, the modified RF signal is provided to the upperelectrode 26 while the lower electrode of the chuck 18 is grounded.

In some embodiments, a processor of an RFG is referred to herein as adedicated processor of the RFG. In various embodiments, a dedicatedprocessor is a processor within an RFG.

Embodiments, described herein, may be practiced with various computersystem configurations including hand-held hardware units, microprocessorsystems, microprocessor-based or programmable consumer electronics,minicomputers, mainframe computers and the like. The embodiments,described herein, can also be practiced in distributed computingenvironments where tasks are performed by remote processing hardwareunits that are linked through a computer network.

In some embodiments, a controller is part of a system, which may be partof the above-described examples. The system includes semiconductorprocessing equipment, including a processing tool or tools, chamber orchambers, a platform or platforms for processing, and/or specificprocessing components (a wafer pedestal, a gas flow system, etc.). Thesystem is integrated with electronics for controlling its operationbefore, during, and after processing of a semiconductor wafer orsubstrate. The electronics is referred to as the “controller,” which maycontrol various components or subparts of the system. The controller,depending on processing requirements and/or a type of the system, isprogrammed to control any process disclosed herein, including a deliveryof process gases, temperature settings (e.g., heating and/or cooling),pressure settings, vacuum settings, power settings, RF generatorsettings, RF matching circuit settings, frequency settings, flow ratesettings, fluid delivery settings, positional and operation settings,wafer transfers into and out of a tool and other transfer tools and/orload locks connected to or interfaced with the system.

Broadly speaking, in a variety of embodiments, the controller is definedas electronics having various integrated circuits, logic, memory, and/orsoftware that receive instructions, issue instructions, controloperation, enable cleaning operations, enable endpoint measurements, andthe like. The integrated circuits include chips in the form of firmwarethat store program instructions, DSPs, chips defined as ASICs, PLDs, oneor more microprocessors, or microcontrollers that execute programinstructions (e.g., software). The program instructions are instructionscommunicated to the controller in the form of various individualsettings (or program files), defining operational parameters forcarrying out a process on or for a semiconductor wafer. The operationalparameters are, in some embodiments, a part of a recipe defined byprocess engineers to accomplish one or more processing steps during thefabrication of one or more layers, materials, metals, oxides, silicon,silicon dioxide, surfaces, circuits, and/or dies of a wafer.

The controller, in some embodiments, is a part of or coupled to acomputer that is integrated with, coupled to the system, otherwisenetworked to the system, or a combination thereof. For example, thecontroller is in a “cloud” or all or a part of a fab host computersystem, which allows for remote access for wafer processing. Thecontroller enables remote access to the system to monitor currentprogress of fabrication operations, examines a history of pastfabrication operations, examines trends or performance metrics from aplurality of fabrication operations, to change parameters of currentprocessing, to set processing steps to follow a current processing, orto start a new process.

In some embodiments, a remote computer (e.g. a server) provides processrecipes to the system over a computer network, which includes a localnetwork or the Internet. The remote computer includes a user interfacethat enables entry or programming of parameters and/or settings, whichare then communicated to the system from the remote computer. In someexamples, the controller receives instructions in the form of settingsfor processing a wafer. It should be understood that the settings arespecific to a type of process to be performed on a wafer and a type oftool that the controller interfaces with or controls. Thus as describedabove, the controller is distributed, such as by including one or morediscrete controllers that are networked together and working towards acommon purpose, such as the fulfilling processes described herein. Anexample of a distributed controller for such purposes includes one ormore integrated circuits on a chamber in communication with one or moreintegrated circuits located remotely (such as at a platform level or aspart of a remote computer) that combine to control a process in achamber.

Without limitation, in various embodiments, the system includes a plasmaetch chamber, a deposition chamber, a spin-rinse chamber, a metalplating chamber, a clean chamber, a bevel edge etch chamber, a physicalvapor deposition (PVD) chamber, a chemical vapor deposition (CVD)chamber, an atomic layer deposition (ALD) chamber, an atomic layer etch(ALE) chamber, an ion implantation chamber, a track chamber, and anyother semiconductor processing chamber that is associated or used infabrication and/or manufacturing of semiconductor wafers.

It is further noted that although the above-described operations aredescribed with reference to a parallel plate plasma chamber, e.g., acapacitively coupled plasma chamber, etc., in some embodiments, theabove-described operations apply to other types of plasma chambers,e.g., a plasma chamber including an inductively coupled plasma (ICP)reactor, a transformer coupled plasma (TCP) reactor, conductor tools,dielectric tools, a plasma chamber including an electron cyclotronresonance (ECR) reactor, etc. For example, the multiple RF generatorsare coupled to an inductor within the ICP plasma chamber.

As noted above, depending on a process operation to be performed by thetool, the controller communicates with one or more of other toolcircuits or modules, other tool components, cluster tools, other toolinterfaces, adjacent tools, neighboring tools, tools located throughouta factory, a main computer, another controller, or tools used inmaterial transport that bring containers of wafers to and from toollocations and/or load ports in a semiconductor manufacturing factory.

With the above embodiments in mind, it should be understood that some ofthe embodiments employ various computer-implemented operations involvingdata stored in computer systems. These computer-implemented operationsare those that manipulate physical quantities.

Some of the embodiments also relate to a hardware unit or an apparatusfor performing these operations. The apparatus is specially constructedfor a special purpose computer. When defined as a special purposecomputer, the computer performs other processing, program execution orroutines that are not part of the special purpose, while still beingcapable of operating for the special purpose.

In some embodiments, the operations, described herein, are performed bya computer selectively activated, or are configured by one or morecomputer programs stored in a computer memory, or are obtained over acomputer network. When data is obtained over the computer network, thedata may be processed by other computers on the computer network, e.g.,a cloud of computing resources.

One or more embodiments, described herein, can also be fabricated ascomputer-readable code on a non-transitory computer-readable medium. Thenon-transitory computer-readable medium is any data storage hardwareunit, e.g., a memory device, etc., that stores data, which is thereafterread by a computer system. Examples of the non-transitorycomputer-readable medium include hard drives, network attached storage(NAS), ROM, RAM, compact disc-ROMs (CD-ROMs), CD-recordables (CD-Rs),CD-rewritables (CD-RWs), magnetic tapes and other optical andnon-optical data storage hardware units. In some embodiments, thenon-transitory computer-readable medium includes a computer-readabletangible medium distributed over a network-coupled computer system sothat the computer-readable code is stored and executed in a distributedfashion.

Although some method operations, described above, were presented in aspecific order, it should be understood that in various embodiments,other housekeeping operations are performed in between the methodoperations, or the method operations are adjusted so that they occur atslightly different times, or are distributed in a system which allowsthe occurrence of the method operations at various intervals, or areperformed in a different order than that described above.

It should further be noted that in an embodiment, one or more featuresfrom any embodiment described above are combined with one or morefeatures of any other embodiment without departing from a scopedescribed in various embodiments described in the present disclosure.

Although the foregoing embodiments have been described in some detailfor purposes of clarity of understanding, it will be apparent thatcertain changes and modifications can be practiced within the scope ofappended claims. Accordingly, the present embodiments are to beconsidered as illustrative and not restrictive, and the embodiments arenot to be limited to the details given herein, but may be modifiedwithin the scope and equivalents of the appended claims.

1. A system for increasing a rate of communication, comprising: a radiofrequency (RF) generator including a dedicated transceiver; a hostcomputer system including a dedicated transceiver coupled to thededicated transceiver of the RF generator; and a dedicated physicalcommunication medium coupling the dedicated transceiver of the RFgenerator to the dedicated transceiver of the host computer system, thededicated transceiver of the RF generator configured to initiate sendingone or more transfer units including information associated with aparameter via the dedicated physical communication medium to thededicated transceiver of the host computer system, the host computersystem configured to process the information associated with theparameter to determine to change a set point of the parameter to furthergenerate a changed set point, the dedicated transceiver of the hostcomputer system configured to send one or more transfer units includingthe changed set point via the dedicated physical communication medium tothe dedicated transceiver of the RF generator, wherein the host computersystem is configured to send the one or more transfer units to the RFgenerator without acknowledging receipt of the one or more transferunits received from the RF generator.
 2. The system of claim 1, whereinthe dedicated transceiver of the host computer system includes atransmitter and a receiver, wherein the dedicated transceiver of the RFgenerator includes a transmitter and a receiver, wherein the transmitterof the host computer system is coupled to the receiver of the RFgenerator via a dedicated communication link, wherein the transmitter ofthe RF generator is coupled to the receiver of the host computer systemvia a dedicated communication link.
 3. The system of claim 2, whereinthe dedicated communication link coupling the transmitter of the hostcomputer system to the receiver of the RF generator is a logical channelhaving a capacity for transferring the one or more transfer units fromthe host computer system to the RF generator, wherein the dedicatedcommunication link coupling the transmitter of the RF generator to thereceiver of the host computer system is a logical channel having acapacity for transferring the one or more transfer units from the RFgenerator to the host computer system.
 4. The system of claim 1, whereinthe RF generator includes a controller, wherein the informationassociated with the parameter includes a value of power supplied by theRF generator, a value of power delivered by the RF generator, a value ofpower reflected towards the RF generator, a value of a real part ofgamma, a value of an imaginary part of gamma, a value of a voltagestanding wave ratio, a set point within the controller of the RFgenerator, a status vector used to determine whether the information isoutside a pre-determined range, a measured value of the parameter, avalue of the parameter that is received from the host computer system,or a combination thereof.
 5. The system of claim 1, wherein thededicated transceiver of the host computer system is configured toreceive the one or more transfer units sent by the dedicated transceiverof the RF generator via the dedicated physical communication mediumwithout requesting the information associated with the parameter fromthe RF generator, wherein the dedicated transceiver of the RF generatoris configured to receive the one or more transfer units sent by thededicated transceiver of the host computer system via the dedicatedphysical communication medium without requesting the changed set pointfrom the host computer system.
 6. The system of claim 1, wherein thehost computer system is configured to not perform a checksum operationon the one or more transfer units received from the dedicatedtransceiver of the RF generator via the dedicated physical communicationmedium, wherein the RF generator is configured to not perform a checksumoperation on the one or more transfer units received from the dedicatedtransceiver of the host computer system via the dedicated physicalcommunication medium.
 7. The system of claim 1, wherein the RF generatoris configured to send the one or more transfer units to the hostcomputer system without acknowledging receipt of the one or moretransfer units received from the host computer system.
 8. A method forincreasing a rate of communication between a radio frequency (RF)generator and a host computer system, comprising: sending one or moretransfer units including information associated with a parameter from adedicated transceiver of the radio frequency (RF) generator via adedicated physical communication medium to a dedicated transceiver ofthe host computer system, processing, by the host computer system, theinformation associated with the parameter to determine to change a setpoint of the parameter to further generate a changed set point; andsending one or more transfer units including the changed set point fromthe dedicated transceiver of the host computer system via the dedicatedphysical communication medium to the dedicated transceiver of the RFgenerator, wherein said sending of the one or more transfer units to theRF generator is performed without acknowledging receipt of the one ormore transfer units received from the RF generator.
 9. The method ofclaim 8, wherein said sending the one or more transfer units from the RFgenerator to the host computer system is performed without acknowledgingreceipt of the one or more transfer units received from the hostcomputer system.
 10. The method of claim 8, further comprising:receiving, by the dedicated transceiver of the host computer system, theone or more transfer units from the dedicated transceiver of the RFgenerator via the dedicated physical communication medium withoutrequesting the information associated with the parameter from the RFgenerator; and receiving, by the dedicated transceiver of the RFgenerator, the one or more transfer units from the dedicated transceiverof the host computer system via the dedicated physical communicationmedium without requesting the changed set point from the host computersystem.
 11. The method of claim 8, further comprising: avoidingperforming a checksum operation on the one or more transfer unitsreceived from the dedicated transceiver of the RF generator via thededicated physical communication medium; and avoiding performing achecksum operation on the one or more transfer units received from thededicated transceiver of the host computer system via the dedicatedphysical communication medium.
 12. The method of claim 8, wherein thededicated transceiver of the host computer system includes a transmitterand a receiver, wherein the dedicated transceiver of the RF generatorincludes a transmitter and a receiver, wherein the transmitter of thehost computer system is coupled to the receiver of the RF generator viaa dedicated communication link, wherein the transmitter of the RFgenerator is coupled to the receiver of the host computer system via adedicated communication link.
 13. The method of claim 12, wherein thededicated communication link coupling the transmitter of the hostcomputer system to the receiver of the RF generator is a logical channelhaving a capacity for transferring the one or more transfer units fromthe host computer system to the RF generator, wherein the dedicatedcommunication link coupling the transmitter of the RF generator to thereceiver of the host computer system is a logical channel having acapacity for transferring the one or more transfer units from the RFgenerator to the host computer system.
 14. The method of claim 8,wherein the information associated with the parameter includes a valueof power supplied by the RF generator, a value of power delivered by theRF generator, a value of power reflected towards the RF generator, avalue of a real part of gamma, a value of an imaginary part of gamma, avalue of a voltage standing wave ratio, a set point within a controllerof the RF generator, a status vector used to determine whether theinformation is outside a pre-determined range, a measured value of theparameter, a value of the parameter that is received from the hostcomputer system, or a combination thereof.
 15. A non-transitory computerreadable medium containing program instructions for increasing a rate ofcommunication between a radio frequency (RF) generator and a hostcomputer system, wherein execution of the program instructions by one ormore processors of a computer system causes the one or more processorsto carry out a plurality of operations of: sending one or more transferunits including information associated with a parameter from a dedicatedtransceiver of the radio frequency (RF) generator via a dedicatedphysical communication medium to a dedicated transceiver of the hostcomputer system, processing, by the host computer system, theinformation associated with the parameter to determine to change a setpoint of the parameter to further generate a changed set point; andsending one or more transfer units including the changed set point fromthe dedicated transceiver of the host computer system via the dedicatedphysical communication medium to the dedicated transceiver of the RFgenerator, wherein said sending of the one or more transfer units to theRF generator is performed without acknowledging receipt of the one ormore transfer units received from the RF generator.
 16. Thenon-transitory computer readable medium of claim 15, wherein theoperation of sending the one or more transfer units from the RFgenerator to the host computer system is performed without acknowledgingreceipt of the one or more transfer units received from the hostcomputer system.
 17. The non-transitory computer readable medium ofclaim 15, wherein the operations further comprise: receiving, by thededicated transceiver of the host computer system, the one or moretransfer units from the dedicated transceiver of the RF generator viathe dedicated physical communication medium without requesting theinformation associated with the parameter from the RF generator; andreceiving, by the dedicated transceiver of the RF generator, the one ormore transfer units from the dedicated transceiver of the host computersystem via the dedicated physical communication medium withoutrequesting the changed set point from the host computer system.
 18. Thenon-transitory computer readable medium of claim 15, wherein theoperations further comprise: avoiding performing a checksum operation onthe one or more transfer units received from the dedicated transceiverof the RF generator via the dedicated physical communication medium; andavoiding performing a checksum operation on the one or more transferunits received from the dedicated transceiver of the host computersystem via the dedicated physical communication medium.
 19. Thenon-transitory computer readable medium of claim 15, wherein thededicated transceiver of the host computer system includes a transmitterand a receiver, wherein the dedicated transceiver of the RF generatorincludes a transmitter and a receiver, wherein the transmitter of thehost computer system is coupled to the receiver of the RF generator viaa dedicated communication link, wherein the transmitter of the RFgenerator is coupled to the receiver of the host computer system via adedicated communication link.
 20. The non-transitory computer readablemedium of claim 19, wherein the dedicated communication link couplingthe transmitter of the host computer system to the receiver of the RFgenerator is a logical channel having a capacity for transferring theone or more transfer units from the host computer system to the RFgenerator, wherein the dedicated communication link coupling thetransmitter of the RF generator to the receiver of the host computersystem is a logical channel having a capacity for transferring the oneor more transfer units from the RF generator to the host computersystem.